| Presentation | 2006-10-06 Position and Size-controlled InN Nano-dot Growth on Patterned Substrates by ECR-MBE Taihei YAMAGUCHI, Hiroyuki NAOI, Tsutomu ARAKI, Yasushi NANISHI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report on the growth of self-aligned InN nano-dots on patterned GaN templates by electron cyclotron resonance plasma-exited molecular beam epitaxy (ECR-MBE). In the fabrication of the self-aligned InN nano-dots, InN was grown by ECR-MBE on GaN templates with reticular patterns of holes, which were prepared by focused ion beam (FIB). The reticular patterns of nano-holes with about a quarter of million pieces were fabricated on the GaN templates using FIB without a mask. The size of InN dots were controlled by varying the hole pitch and growth temperature. Furthermore, the shape of InN dots changed by thermal annealing after the growth. When InN dots were grown with the optimum conditions, each hole has a single dot with uniform sized. We have succeeded in controlling position and size of InN nano-dots array by ECR-MBE on nano-patterned substrates. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ECR-MBE / Quantum dot / Indium nitride / FIB |
| Paper # | ED2006-174,CPM2006-111,LQE2006-78 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2006/9/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Position and Size-controlled InN Nano-dot Growth on Patterned Substrates by ECR-MBE |
| Sub Title (in English) | |
| Keyword(1) | ECR-MBE |
| Keyword(2) | Quantum dot |
| Keyword(3) | Indium nitride |
| Keyword(4) | FIB |
| 1st Author's Name | Taihei YAMAGUCHI |
| 1st Author's Affiliation | Department of Photonics, Ritsumeikan University() |
| 2nd Author's Name | Hiroyuki NAOI |
| 2nd Author's Affiliation | Center for Promotion of the COE Program, Ritsumeikan University |
| 3rd Author's Name | Tsutomu ARAKI |
| 3rd Author's Affiliation | Department of Photonics, Ritsumeikan University |
| 4th Author's Name | Yasushi NANISHI |
| 4th Author's Affiliation | Department of Photonics, Ritsumeikan University:Center for Promotion of the COE Program, Ritsumeikan University |
| Date | 2006-10-06 |
| Paper # | ED2006-174,CPM2006-111,LQE2006-78 |
| Volume (vol) | vol.106 |
| Number (no) | 271 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |