| Presentation | 2006-10-06 Nitridation of SiC Surface and Characterization by using XPS Tetsuo YAMAGUCHI, Yoshiki ISHIDA, Chen CHEN, Masataka HAGIHARA, Rinpei HAYASHIBE, Tomohiko YAMAKAMI, Katsuya ABE, Kiichi KAMIMURA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Nitride layers were formed on SiC surface by thermal nitridation or plasma nitridation. The surface was characterized by using XPS. The thickness of the nitride layer increased with increasing nitridation time, and then saturated in several minutes. Extremely thin layer was detected at the SiC surface after the nitridation. The peaks from Si, C, O and N were detected at the SiC surface by XPS measurements. These peaks indicated that the surface layer was consisted of mainly SiON. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SiC / Nitridation / Nitride / MIS / SiN |
| Paper # | ED2006-173,CPM2006-110,LQE2006-77 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2006/9/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nitridation of SiC Surface and Characterization by using XPS |
| Sub Title (in English) | |
| Keyword(1) | SiC |
| Keyword(2) | Nitridation |
| Keyword(3) | Nitride |
| Keyword(4) | MIS |
| Keyword(5) | SiN |
| 1st Author's Name | Tetsuo YAMAGUCHI |
| 1st Author's Affiliation | Faculty of Engineering, Shinshu University() |
| 2nd Author's Name | Yoshiki ISHIDA |
| 2nd Author's Affiliation | Faculty of Engineering, Shinshu University |
| 3rd Author's Name | Chen CHEN |
| 3rd Author's Affiliation | Faculty of Engineering, Shinshu University |
| 4th Author's Name | Masataka HAGIHARA |
| 4th Author's Affiliation | Faculty of Engineering, Shinshu University |
| 5th Author's Name | Rinpei HAYASHIBE |
| 5th Author's Affiliation | Faculty of Engineering, Shinshu University |
| 6th Author's Name | Tomohiko YAMAKAMI |
| 6th Author's Affiliation | Faculty of Engineering, Shinshu University |
| 7th Author's Name | Katsuya ABE |
| 7th Author's Affiliation | Faculty of Engineering, Shinshu University |
| 8th Author's Name | Kiichi KAMIMURA |
| 8th Author's Affiliation | Faculty of Engineering, Shinshu University |
| Date | 2006-10-06 |
| Paper # | ED2006-173,CPM2006-110,LQE2006-77 |
| Volume (vol) | vol.106 |
| Number (no) | 271 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |