Presentation 2006/9/28
Molecular Dynamics Simulation on the Growth and Properties of Diamond Like Carbon
Toshiaki SHIBATA, Shuko TAKAHASHI, Ryuji MIURA, Hideyuki TSUBOI, Michihisa KOYAMA, Akira ENDOU, Hiromistu TAKABA, Momoji KUBO, CARPIO Carlos A. DEL, Akira MIYAMOTO,
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Abstract(in English) Classical molecular dynamics can be applied to large-scale calculation, however it cannot deal with the chemical reaction due to its theoretical limitation. To study the chemical reaction dynamics of large system, we have developed a classical molecular dynamics program with chemical reaction extension, which can stochastically deal with the bond formation and dissociation. This program was used to simulate the growth of diamond like carbon and we calculated the friction coefficient dependent on the difference of the structures.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Diamond like Carbon / Molecular Dynamics
Paper # SDM2006-186
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Conference Information
Committee SDM
Conference Date 2006/9/28(1days)
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Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Molecular Dynamics Simulation on the Growth and Properties of Diamond Like Carbon
Sub Title (in English)
Keyword(1) Diamond like Carbon
Keyword(2) Molecular Dynamics
1st Author's Name Toshiaki SHIBATA
1st Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University()
2nd Author's Name Shuko TAKAHASHI
2nd Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
3rd Author's Name Ryuji MIURA
3rd Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
4th Author's Name Hideyuki TSUBOI
4th Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
5th Author's Name Michihisa KOYAMA
5th Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
6th Author's Name Akira ENDOU
6th Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
7th Author's Name Hiromistu TAKABA
7th Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
8th Author's Name Momoji KUBO
8th Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University:PRESTO, Japan Science and Technology Agency
9th Author's Name CARPIO Carlos A. DEL
9th Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
10th Author's Name Akira MIYAMOTO
10th Author's Affiliation Department of Applied Chemistry, Graduate School of Engineering, Tohoku University:New Industry Creation Hatchery Center, Tohoku University
Date 2006/9/28
Paper # SDM2006-186
Volume (vol) vol.106
Number (no) 277
Page pp.pp.-
#Pages 2
Date of Issue