| Presentation | 2006-10-27 MEMS CPW Hybrid Coupler with Capacitive Coupling Yusuke KITSUKAWA, Masatake HANGAI, Sang-Seok LEE, Tamotsu NISHINO, Yukihisa YOSHIDA, Moriyasu MIYAZAKI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new micromachined coplanar waveguide (CPW) 3-dB hybrid coupler has been demonstrated. A micromachined enhanced coupling structure at the middle of coupled transmission lines is employed to obtain high directivity. The coupling structure is composed of alternately overlapping plated conductors employing micromachined air-gap structures. This structure relaxes the tolerance of the gap between the coupled lines, and mitigates production error. We fabricate the CPW hybrid coupler with the enhanced coupling structure on a silicon substrate to verify the performance. The results showed the return loss of 28dB, the insertion loss of 0.7dB, and the isolation of 25dB at 13GHz. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CPW / DIRECTIONAL COUPLER / AIR-GAP / MEMS |
| Paper # | EMCJ2006-67,MW2006-123 |
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| Conference Information | |
| Committee | EMCJ |
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| Conference Date | 2006/10/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electromagnetic Compatibility (EMCJ) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MEMS CPW Hybrid Coupler with Capacitive Coupling |
| Sub Title (in English) | |
| Keyword(1) | CPW |
| Keyword(2) | DIRECTIONAL COUPLER |
| Keyword(3) | AIR-GAP |
| Keyword(4) | MEMS |
| 1st Author's Name | Yusuke KITSUKAWA |
| 1st Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center() |
| 2nd Author's Name | Masatake HANGAI |
| 2nd Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 3rd Author's Name | Sang-Seok LEE |
| 3rd Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 4th Author's Name | Tamotsu NISHINO |
| 4th Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 5th Author's Name | Yukihisa YOSHIDA |
| 5th Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 6th Author's Name | Moriyasu MIYAZAKI |
| 6th Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| Date | 2006-10-27 |
| Paper # | EMCJ2006-67,MW2006-123 |
| Volume (vol) | vol.106 |
| Number (no) | 322 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |