| Presentation | 2006-09-08 LSI wafer inspection method using recursive splitting of feature space Kaoru SAKAI, Shunji MAEDA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To detect minute defects on the complicated multilayer patterns of semiconductor wafers, effective inspection algorithm is essential. There are multiple dies on a wafer that are designed to be same. We propose a highly sensitive die-to-die comparison algorithm that can recognize the defects buried in the pattern variation noise due to process fluctuation. This comparison algorithm is based on recursive splitting of feature space. The method has the same procedures as the regression tree. The images to be compared are separated into several regions by the recursive splitting of feature space. For each region, defects are recognized as statistical outliers in the scattergram of the images. The effectiveness of the method is confirmed through the experiments. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | inspection / defect / regression tree / feature space / scattergram / statistical outlier |
| Paper # | PRMU2006-69 |
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| Conference Information | |
| Committee | PRMU |
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| Conference Date | 2006/9/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Pattern Recognition and Media Understanding (PRMU) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | LSI wafer inspection method using recursive splitting of feature space |
| Sub Title (in English) | |
| Keyword(1) | inspection |
| Keyword(2) | defect |
| Keyword(3) | regression tree |
| Keyword(4) | feature space |
| Keyword(5) | scattergram |
| Keyword(6) | statistical outlier |
| 1st Author's Name | Kaoru SAKAI |
| 1st Author's Affiliation | Hitachi, LTD., Production Engineering Research Laboratory() |
| 2nd Author's Name | Shunji MAEDA |
| 2nd Author's Affiliation | Hitachi, LTD., Production Engineering Research Laboratory |
| Date | 2006-09-08 |
| Paper # | PRMU2006-69 |
| Volume (vol) | vol.106 |
| Number (no) | 229 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |