| Presentation | 2006-09-25 Analysis of the Scaling Feasibility in SRAM by Mixed-mode 3-dimentional Device Simulation Ryo Tanabe, Yoshio Ashizawa, Hideki Oka, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the progress of CMOS circuits' miniaturization, SRAM is considered to set a limit to the progress. In this paper, problems of SRAM development are picked up and their solutions are investigated by 3D Mixed-mode TCAD simulation We pick up the fluctuations of structure, discrete dopant and circuit delay. In addition, we will show the relationship between SRAM characteristics (Static Noise Margin and I_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SRAM / FinFET / Mixed-mode / TCAD / MOS / Quantum Effect / Tunneling Current / Scaling / Random Dopant Fluctuation |
| Paper # | VLD2006-36,SDM2006-157 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/9/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of the Scaling Feasibility in SRAM by Mixed-mode 3-dimentional Device Simulation |
| Sub Title (in English) | |
| Keyword(1) | SRAM |
| Keyword(2) | FinFET |
| Keyword(3) | Mixed-mode |
| Keyword(4) | TCAD |
| Keyword(5) | MOS |
| Keyword(6) | Quantum Effect |
| Keyword(7) | Tunneling Current |
| Keyword(8) | Scaling |
| Keyword(9) | Random Dopant Fluctuation |
| 1st Author's Name | Ryo Tanabe |
| 1st Author's Affiliation | Fujitsu Laboratories Ltd.() |
| 2nd Author's Name | Yoshio Ashizawa |
| 2nd Author's Affiliation | Fujitsu Laboratories Ltd. |
| 3rd Author's Name | Hideki Oka |
| 3rd Author's Affiliation | Fujitsu Laboratories Ltd. |
| Date | 2006-09-25 |
| Paper # | VLD2006-36,SDM2006-157 |
| Volume (vol) | vol.106 |
| Number (no) | 256 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |