| Presentation | 2006-08-18 A Test Structure to Separately Analyze CMOSFET Reliabilities along The Channel Width Takashi OHZONE, Eiji ISHII, Takayuki MORISHITA, Kiyotaka KOMOKU, Toshihiro MATSUDA, Hideyuki IWATA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A test structure with four kinds of MOSFETs(i.e., [A]([D]) with a short(long) channel-length all over the channel width, [B]([C]) with the short(long) and the long(short) channel-length around the center and the both isolation-edges, respectively) was proposed to separately analyze the location where the hot-carrier-induced CMOSFET reliability is determined around the center or the isolation-edge along the channel-width. The reliability data were almost categorized into three (i.e., [A], [B]/[C] and [D]), which mean that the reliabilities are nearly the same around center or isolation-edge for the CMOSFETs. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CMOSFET / reliability / LDD-type / channel width / isolation |
| Paper # | SDM2006-142,ICD2006-96 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/8/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Test Structure to Separately Analyze CMOSFET Reliabilities along The Channel Width |
| Sub Title (in English) | |
| Keyword(1) | CMOSFET |
| Keyword(2) | reliability |
| Keyword(3) | LDD-type |
| Keyword(4) | channel width |
| Keyword(5) | isolation |
| 1st Author's Name | Takashi OHZONE |
| 1st Author's Affiliation | Faculty of Computer Science and System Engineering, Okayama Prefectural University() |
| 2nd Author's Name | Eiji ISHII |
| 2nd Author's Affiliation | Faculty of Computer Science and System Engineering, Okayama Prefectural University |
| 3rd Author's Name | Takayuki MORISHITA |
| 3rd Author's Affiliation | Faculty of Computer Science and System Engineering, Okayama Prefectural University |
| 4th Author's Name | Kiyotaka KOMOKU |
| 4th Author's Affiliation | Faculty of Computer Science and System Engineering, Okayama Prefectural University |
| 5th Author's Name | Toshihiro MATSUDA |
| 5th Author's Affiliation | Faculty of Engineering, Toyama Prefectural University |
| 6th Author's Name | Hideyuki IWATA |
| 6th Author's Affiliation | Faculty of Engineering, Toyama Prefectural University |
| Date | 2006-08-18 |
| Paper # | SDM2006-142,ICD2006-96 |
| Volume (vol) | vol.106 |
| Number (no) | 206 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |