| Presentation | 2006/9/1 On the existence of the template layer guiding the low-resistivity ITO films by plasma sputtering Akihiko KONO, Fumiya SHOJI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have studied the effect of substrate temperature on the electrical properties of tin-doped indium oxide films by the low pressure plasma sputtering. In thick films (>100nm), the carrier density of the films on heated substrates increased by approximately three times compared with those of films on unheated substrates. As a result, low-resistivity (9.8×10^<-5>Ωcm) ITO films were obtained on the heated substrates. Furthermore, there was evidence that anomalous behavior of carrier density existed in thin thickness range (0～40nm) irrespective of the substrate temperature. The existence of the template layer guiding the low-resistivity ITO films was strongly suggested from changes of number of carriers as a function of the film thickness. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ITO film / Plasma sputtering |
| Paper # | ED2006-144,OME2006-69 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2006/9/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | On the existence of the template layer guiding the low-resistivity ITO films by plasma sputtering |
| Sub Title (in English) | |
| Keyword(1) | ITO film |
| Keyword(2) | Plasma sputtering |
| 1st Author's Name | Akihiko KONO |
| 1st Author's Affiliation | Facutly of Engineering, Kyusyu Kyoritsu University() |
| 2nd Author's Name | Fumiya SHOJI |
| 2nd Author's Affiliation | Facutly of Engineering, Kyusyu Kyoritsu University |
| Date | 2006/9/1 |
| Paper # | ED2006-144,OME2006-69 |
| Volume (vol) | vol.106 |
| Number (no) | 228 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |