| Presentation | 2006/9/1 Development of Sensor detecting the electrostatic Charge Generated at Small Area : Crystalline and Electrical Properties for TiO_2 Films Deposited by Using Rf Magnetron Sputtering Norimoto NOUCHI, Atsusi MIYAZATO, Fumiya SHOJI, Tadao NOZAWA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have investigated both crystalline and electrical properties for TiO_2 films deposited onto Ferrite substrate, which are essentially important for the sensor detecting the electrostatic charge generated at the small area. These films are prepared by using Rf magnetron sputtering equipment in oxygen atmosphere. It is found experimentally that annealing the film in vacuum of 700℃, which is deposited at the substrate temperature of 300℃, provides higher dielectric constant, 16, meanwhile it leads the phase change, i.e., from anatase to rutile structure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Electrostatic charge / Sensor / Rf magnetron / TiO_2 film / Dielectric constant / Rutile structure / Ferrite |
| Paper # | ED2006-143,OME2006-68 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2006/9/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Sensor detecting the electrostatic Charge Generated at Small Area : Crystalline and Electrical Properties for TiO_2 Films Deposited by Using Rf Magnetron Sputtering |
| Sub Title (in English) | |
| Keyword(1) | Electrostatic charge |
| Keyword(2) | Sensor |
| Keyword(3) | Rf magnetron |
| Keyword(4) | TiO_2 film |
| Keyword(5) | Dielectric constant |
| Keyword(6) | Rutile structure |
| Keyword(7) | Ferrite |
| 1st Author's Name | Norimoto NOUCHI |
| 1st Author's Affiliation | Faculty of Engineering, Kyusyu Kyoritsu University() |
| 2nd Author's Name | Atsusi MIYAZATO |
| 2nd Author's Affiliation | Sanwa Koki Co. Ltd. |
| 3rd Author's Name | Fumiya SHOJI |
| 3rd Author's Affiliation | Faculty of Engineering, Kyusyu Kyoritsu University |
| 4th Author's Name | Tadao NOZAWA |
| 4th Author's Affiliation | Faculty of Engineering, Kyusyu Kyoritsu University |
| Date | 2006/9/1 |
| Paper # | ED2006-143,OME2006-68 |
| Volume (vol) | vol.106 |
| Number (no) | 228 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |