| Presentation | 2006-08-24 Fabrication of Blazed Gratings by SR Exposure System Tomohiko KANIE, Makoto KATAYAMA, Teppei MORITA, Noboru TOSHIMA, Junichi KATO, Tomio NAGAYAMA, Yasushi MIZUTANI, Fumiki KATO, Shinya FUJINAWA, Susumu SUGIYAMA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have successively fabricated a blazed nano grating based on the X-ray gray-scale lithography technology. The structure of PMMA resist were included triangle shapes by exposing a synchrotron radiation to a moving PMMA resist. But the shape of the oblique side was not linearity and the vertical side had a small slop because of the influence of the Fresnel diffraction. The modulation depth of blazed grating is enabled to control by the deposited doses of X-ray. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | X-ray lithography / blazed grating / synchrotron radiation / Fresnel diffraction |
| Paper # | OFT2006-17 |
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| Conference Information | |
| Committee | OFT |
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| Conference Date | 2006/8/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Optical Fiber Technology (OFT) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Blazed Gratings by SR Exposure System |
| Sub Title (in English) | |
| Keyword(1) | X-ray lithography |
| Keyword(2) | blazed grating |
| Keyword(3) | synchrotron radiation |
| Keyword(4) | Fresnel diffraction |
| 1st Author's Name | Tomohiko KANIE |
| 1st Author's Affiliation | Sumitomo Electric Industries, Ltd.() |
| 2nd Author's Name | Makoto KATAYAMA |
| 2nd Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| 3rd Author's Name | Teppei MORITA |
| 3rd Author's Affiliation | Nakanuma Art Screen Co, Ltd. |
| 4th Author's Name | Noboru TOSHIMA |
| 4th Author's Affiliation | Nakanuma Art Screen Co, Ltd. |
| 5th Author's Name | Junichi KATO |
| 5th Author's Affiliation | Nakanuma Art Screen Co, Ltd. |
| 6th Author's Name | Tomio NAGAYAMA |
| 6th Author's Affiliation | Kyoto Municipal Industrial Research Institute |
| 7th Author's Name | Yasushi MIZUTANI |
| 7th Author's Affiliation | Kyoto Municipal Industrial Research Institute |
| 8th Author's Name | Fumiki KATO |
| 8th Author's Affiliation | Ritsumeikan University |
| 9th Author's Name | Shinya FUJINAWA |
| 9th Author's Affiliation | Ritsumeikan University |
| 10th Author's Name | Susumu SUGIYAMA |
| 10th Author's Affiliation | Ritsumeikan University |
| Date | 2006-08-24 |
| Paper # | OFT2006-17 |
| Volume (vol) | vol.106 |
| Number (no) | 211 |
| Page | pp.pp.- |
| #Pages | 3 |
| Date of Issue | |