Presentation 2006-08-25
Micromachined VCSELs and resonant photodetectors with controlled temperature dependence
Wiganes Janto, Koichi HASEBE, Nobuhiko NISHIYAMA, Catherine CANEAU, Takahiro SAKAGUCHI, Akihiro MATSUTANI, Fumio KOYAMA, Chung-En ZAH,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this paper, we propose and demonstrate micromachined InP vertical cavity surface emitting lasers (InP VCSELs) and resonant-cavity photodetectors with a thermal strain control layer for temperature insensitive operations. The thermal strain control layer is employed on the cantilever so that an increase in temperature moves the cantilever downward, resulting in a blue wavelength shift which is against with the red wavelength shift caused by the temperature effect in semiconductor materials. Using such a bimorph effect the temperature dependence can be freely controlled in a micromachined cantilever structure, avoiding the use of a temperature controller. From experiments, we obtain temperature dependences of 0.04nm/K and 0.031nm/K for micromachined InP VCSELs and photodetectors with an 85-μm long cantilever, which is almost three-times less than that of ~0.1nm/K for typical semiconductor lasers.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) temperature insensitive operation / VCSELs / resonant-cavity photodetectors / bimorph effect
Paper # EMD2006-47,CPM2006-77,OPE2006-89,LQE2006-54
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Conference Information
Committee EMD
Conference Date 2006/8/17(1days)
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Registration To Electromechanical Devices (EMD)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Micromachined VCSELs and resonant photodetectors with controlled temperature dependence
Sub Title (in English)
Keyword(1) temperature insensitive operation
Keyword(2) VCSELs
Keyword(3) resonant-cavity photodetectors
Keyword(4) bimorph effect
1st Author's Name Wiganes Janto
1st Author's Affiliation Microsystem Research Center, P&I Lab., Tokyo Institute of Technology()
2nd Author's Name Koichi HASEBE
2nd Author's Affiliation Microsystem Research Center, P&I Lab., Tokyo Institute of Technology
3rd Author's Name Nobuhiko NISHIYAMA
3rd Author's Affiliation Corning Incorporated
4th Author's Name Catherine CANEAU
4th Author's Affiliation Corning Incorporated
5th Author's Name Takahiro SAKAGUCHI
5th Author's Affiliation Microsystem Research Center, P&I Lab., Tokyo Institute of Technology
6th Author's Name Akihiro MATSUTANI
6th Author's Affiliation Microsystem Research Center, P&I Lab., Tokyo Institute of Technology
7th Author's Name Fumio KOYAMA
7th Author's Affiliation Microsystem Research Center, P&I Lab., Tokyo Institute of Technology
8th Author's Name Chung-En ZAH
8th Author's Affiliation Corning Incorporated
Date 2006-08-25
Paper # EMD2006-47,CPM2006-77,OPE2006-89,LQE2006-54
Volume (vol) vol.106
Number (no) 212
Page pp.pp.-
#Pages 4
Date of Issue