Presentation | 2006-08-25 Micromachined VCSELs and resonant photodetectors with controlled temperature dependence Wiganes Janto, Koichi HASEBE, Nobuhiko NISHIYAMA, Catherine CANEAU, Takahiro SAKAGUCHI, Akihiro MATSUTANI, Fumio KOYAMA, Chung-En ZAH, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In this paper, we propose and demonstrate micromachined InP vertical cavity surface emitting lasers (InP VCSELs) and resonant-cavity photodetectors with a thermal strain control layer for temperature insensitive operations. The thermal strain control layer is employed on the cantilever so that an increase in temperature moves the cantilever downward, resulting in a blue wavelength shift which is against with the red wavelength shift caused by the temperature effect in semiconductor materials. Using such a bimorph effect the temperature dependence can be freely controlled in a micromachined cantilever structure, avoiding the use of a temperature controller. From experiments, we obtain temperature dependences of 0.04nm/K and 0.031nm/K for micromachined InP VCSELs and photodetectors with an 85-μm long cantilever, which is almost three-times less than that of ~0.1nm/K for typical semiconductor lasers. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | temperature insensitive operation / VCSELs / resonant-cavity photodetectors / bimorph effect |
Paper # | EMD2006-47,CPM2006-77,OPE2006-89,LQE2006-54 |
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Committee | EMD |
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Conference Date | 2006/8/17(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electromechanical Devices (EMD) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Micromachined VCSELs and resonant photodetectors with controlled temperature dependence |
Sub Title (in English) | |
Keyword(1) | temperature insensitive operation |
Keyword(2) | VCSELs |
Keyword(3) | resonant-cavity photodetectors |
Keyword(4) | bimorph effect |
1st Author's Name | Wiganes Janto |
1st Author's Affiliation | Microsystem Research Center, P&I Lab., Tokyo Institute of Technology() |
2nd Author's Name | Koichi HASEBE |
2nd Author's Affiliation | Microsystem Research Center, P&I Lab., Tokyo Institute of Technology |
3rd Author's Name | Nobuhiko NISHIYAMA |
3rd Author's Affiliation | Corning Incorporated |
4th Author's Name | Catherine CANEAU |
4th Author's Affiliation | Corning Incorporated |
5th Author's Name | Takahiro SAKAGUCHI |
5th Author's Affiliation | Microsystem Research Center, P&I Lab., Tokyo Institute of Technology |
6th Author's Name | Akihiro MATSUTANI |
6th Author's Affiliation | Microsystem Research Center, P&I Lab., Tokyo Institute of Technology |
7th Author's Name | Fumio KOYAMA |
7th Author's Affiliation | Microsystem Research Center, P&I Lab., Tokyo Institute of Technology |
8th Author's Name | Chung-En ZAH |
8th Author's Affiliation | Corning Incorporated |
Date | 2006-08-25 |
Paper # | EMD2006-47,CPM2006-77,OPE2006-89,LQE2006-54 |
Volume (vol) | vol.106 |
Number (no) | 212 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |