| Presentation | 2006/6/26 Crystallization Enhancement of Ferroelectric PZT Thin Films by using Continuous-Wave Laser(Session 9A Silicon Devices VI) Koji Kotani, Kiichiro Tago, Shin-Ichiro Kuroki, Takashi Ito, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Crystallization of ferroelectric PZT thin films has been greatly enhanced by using a continuous wave (CW) laser. A laser-beam was focused into a 180μm×40μm elliptical shape, and scanned on the PZT film in the direction of the minor axis at speeds of 0.1-10cm/sec. PZT thin films are annealed locally and the substrate temperature can be maintained low enough. Characterization of the films was made by in-plane. Consequently, for the PZT thin films of 50-150nm thickness, the perovskite phase was increased by using CW laser annealing while the increase of the pyrochlore phase was suppressed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PZT / ferroelectric thin film / DPSS-CW laser |
| Paper # | ED2006-112,SDM2006-120 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/6/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Crystallization Enhancement of Ferroelectric PZT Thin Films by using Continuous-Wave Laser(Session 9A Silicon Devices VI) |
| Sub Title (in English) | |
| Keyword(1) | PZT |
| Keyword(2) | ferroelectric thin film |
| Keyword(3) | DPSS-CW laser |
| 1st Author's Name | Koji Kotani |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Kiichiro Tago |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Shin-Ichiro Kuroki |
| 3rd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Takashi Ito |
| 4th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| Date | 2006/6/26 |
| Paper # | ED2006-112,SDM2006-120 |
| Volume (vol) | vol.106 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |