| Presentation | 2006/6/26 An Uncooled Infrared Detector with Electrically Floated Absorber Structure(Session 8B Emerging Devices and Technologies II) Il-Woong Kwon, Yong-Soo Lee, Hee-Chul Lee, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A capacitive type uncooled infrared detector structure with new capacitance reading scheme is investigated. The structure has two parts: infrared absorber and bi-material legs. The infrared absorber has an insulator-metal-insulator structure, and acts as a top electrode of a variable capacitor composed of two bottom electrodes and top electrode (infrared absorber) which is separated electrically from the substrate. The absorber is posted to the substrate through bi-material legs which are designed to have electrical insulation, low thermal conductance and temperature dependent deformation characteristics. Thermal energy from absorbed infrared rays is transferred to the bi-material legs, resulting in leg bending, top floating electrode (absorber) lifting, and capacitance change of the variable capacitor. Electrical signal part and mechanical moving part of a MEMS structure can be separated with this scheme. Therefore, it is applicable to high Q-factor capacitors of other devices such as ultrasonic sensors. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Uncooled infrared detector / Variable Capacitor / Bi-material / MEMS |
| Paper # | ED2006-106,SDM2006-114 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/6/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | An Uncooled Infrared Detector with Electrically Floated Absorber Structure(Session 8B Emerging Devices and Technologies II) |
| Sub Title (in English) | |
| Keyword(1) | Uncooled infrared detector |
| Keyword(2) | Variable Capacitor |
| Keyword(3) | Bi-material |
| Keyword(4) | MEMS |
| 1st Author's Name | Il-Woong Kwon |
| 1st Author's Affiliation | Dept. of EECS() |
| 2nd Author's Name | Yong-Soo Lee |
| 2nd Author's Affiliation | Dept. of EECS |
| 3rd Author's Name | Hee-Chul Lee |
| 3rd Author's Affiliation | Dept. of EECS |
| Date | 2006/6/26 |
| Paper # | ED2006-106,SDM2006-114 |
| Volume (vol) | vol.106 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |