| Presentation | 2006/6/26 RF MEMS Switch using the Pull-up Structure for High Long-term Reliability and Low Actuation Voltage(Session 8B Emerging Devices and Technologies II) Seong-Dae Lee, Byoung-Chul Jun, Sam-Dong Kim, Jin-Koo Rhee, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we developed the RF MEMS switch using the pull-up structure for high long-term reliability and low actuation voltage. To achieve the high long-term reliability and low actuation voltage, the RF MEMS switch adopted the pull-up structure using the movable contact pad, instead of cantilevers or fixed-fixed beams, because the movable contact pad was not deformed by electrostatic force. Reliable operations were demonstrated at a very low actuation voltage of 4.5V. After 23 billion cyclic actuations, the reliable actuation voltages smaller than 5V are obtained, while insertion loss and isolation are maintained below 0.51 and 55.0dB, respectively, at 50 GHz. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS switch / pull-up structure / movable contact pad / low actuation voltage / high long-term reliability |
| Paper # | ED2006-105,SDM2006-113 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/6/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | RF MEMS Switch using the Pull-up Structure for High Long-term Reliability and Low Actuation Voltage(Session 8B Emerging Devices and Technologies II) |
| Sub Title (in English) | |
| Keyword(1) | MEMS switch |
| Keyword(2) | pull-up structure |
| Keyword(3) | movable contact pad |
| Keyword(4) | low actuation voltage |
| Keyword(5) | high long-term reliability |
| 1st Author's Name | Seong-Dae Lee |
| 1st Author's Affiliation | Millimeter-wave Innovation Technology Research Center (MINT), Dongguk University() |
| 2nd Author's Name | Byoung-Chul Jun |
| 2nd Author's Affiliation | Millimeter-wave Innovation Technology Research Center (MINT), Dongguk University |
| 3rd Author's Name | Sam-Dong Kim |
| 3rd Author's Affiliation | Millimeter-wave Innovation Technology Research Center (MINT), Dongguk University |
| 4th Author's Name | Jin-Koo Rhee |
| 4th Author's Affiliation | Millimeter-wave Innovation Technology Research Center (MINT), Dongguk University |
| Date | 2006/6/26 |
| Paper # | ED2006-105,SDM2006-113 |
| Volume (vol) | vol.106 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |