| Presentation | 2006/6/26 Large Grain Growth of Silicon Thin Films by using CW Green Laser(Session 6A Silicon Devices III,AWAD2006) Shin-Ichiro Kuroki, Shuntaro Fujii, Koji Kotani, Takashi Ito, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Low temperature crystallization of amorphous silicon (a-Si) thin films using a diode-pumped solid state (DPSS) continuous wave (CW) laser was investigated. A laser beam spot was designed for a gradual slope of temperature in a laser irradiated region, and was elongated to a scanning direction. The elongated laser spot with a gradual slope of temperature make a crystallization time longer. Consequently, a two dimensional lateral crystallization of (100) well-oriented Si thin films was achieved. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | polycrystalline silicon thin films / thin film transistor / Laser recrystallization |
| Paper # | ED2006-79,SDM2006-87 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/6/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Large Grain Growth of Silicon Thin Films by using CW Green Laser(Session 6A Silicon Devices III,AWAD2006) |
| Sub Title (in English) | |
| Keyword(1) | polycrystalline silicon thin films |
| Keyword(2) | thin film transistor |
| Keyword(3) | Laser recrystallization |
| 1st Author's Name | Shin-Ichiro Kuroki |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Shuntaro Fujii |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Koji Kotani |
| 3rd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Takashi Ito |
| 4th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| Date | 2006/6/26 |
| Paper # | ED2006-79,SDM2006-87 |
| Volume (vol) | vol.106 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |