Presentation 2006/6/26
Retention Time Analysis on DRAM Cell Transistor from Planar to Nonplanar Gate Structures(Session 4 Silicon Devices II,AWAD2006)
Jae Hoon CHOI, Sang Yong KIM, Sang Dong YOO, Seon Yong CHA, Moon Sik SEO, Eun Mi KWON, Myung Hee KANG, Sung Kye PARK, Sung Joo HONG,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We examined the characteristics of the DRAM cell transistor's retention time by extracting the electric field peak values and their positions using a new simulation method with traps. In order to enhance the retention time, it is essential to reduce the electric field at the storage node junction, which should be performed by decrease the channel doping level without any change in the threshold voltage. We compared the planar gate structure with the non-planar, and the symmetric doping profiles with the asymmetric ones.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Retention Time / DRAM Cell Transistor / Electric Field / Leakage Current / Trap
Paper # ED2006-73,SDM2006-81
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Committee SDM
Conference Date 2006/6/26(1days)
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Registration To Silicon Device and Materials (SDM)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Retention Time Analysis on DRAM Cell Transistor from Planar to Nonplanar Gate Structures(Session 4 Silicon Devices II,AWAD2006)
Sub Title (in English)
Keyword(1) Retention Time
Keyword(2) DRAM Cell Transistor
Keyword(3) Electric Field
Keyword(4) Leakage Current
Keyword(5) Trap
1st Author's Name Jae Hoon CHOI
1st Author's Affiliation R&D Division, Hynix Semiconductor Inc.()
2nd Author's Name Sang Yong KIM
2nd Author's Affiliation R&D Division, Hynix Semiconductor Inc.
3rd Author's Name Sang Dong YOO
3rd Author's Affiliation R&D Division, Hynix Semiconductor Inc.
4th Author's Name Seon Yong CHA
4th Author's Affiliation R&D Division, Hynix Semiconductor Inc.
5th Author's Name Moon Sik SEO
5th Author's Affiliation R&D Division, Hynix Semiconductor Inc.
6th Author's Name Eun Mi KWON
6th Author's Affiliation R&D Division, Hynix Semiconductor Inc.
7th Author's Name Myung Hee KANG
7th Author's Affiliation R&D Division, Hynix Semiconductor Inc.
8th Author's Name Sung Kye PARK
8th Author's Affiliation R&D Division, Hynix Semiconductor Inc.
9th Author's Name Sung Joo HONG
9th Author's Affiliation R&D Division, Hynix Semiconductor Inc.
Date 2006/6/26
Paper # ED2006-73,SDM2006-81
Volume (vol) vol.106
Number (no) 138
Page pp.pp.-
#Pages 4
Date of Issue