| Presentation | 2006/6/26 Analysis of Interface Property of SiGe-On-Insulator (SGOI) Substrate with a Strained-Si Layer for Nano-CMOS Device Applications(Session 4 Silicon Devices II,AWAD2006) Won-Ju Cho, Woo-Hyun Lee, Hyun-Mo Goo, Chang-Geun Ahn, Jong-Heon Yang, In-Bok Baek, Seong-jae Lee, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The effects of heat treatment on the electrical properties of strained-Si SiGe-on-insulator (SGOI) substrate as well as silicon-on-insulator (SOI) were examined. Furthermore, we proposed the optimized heat treatment processes for improving the interface properties of SGOI substrate and the electrical characteristics of SGOI MOSFET with a strained-Si channel. Both pre-rapid thermal process (RTP) and post-RTA annealing (PRA) are inevitable to obtain enhanced DC characteristics in strained Si SGOI n-MOSFET. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SGOI / strained-Si / heat treatment / interface property / MOSFETs |
| Paper # | ED2006-72,SDM2006-80 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/6/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of Interface Property of SiGe-On-Insulator (SGOI) Substrate with a Strained-Si Layer for Nano-CMOS Device Applications(Session 4 Silicon Devices II,AWAD2006) |
| Sub Title (in English) | |
| Keyword(1) | SGOI |
| Keyword(2) | strained-Si |
| Keyword(3) | heat treatment |
| Keyword(4) | interface property |
| Keyword(5) | MOSFETs |
| 1st Author's Name | Won-Ju Cho |
| 1st Author's Affiliation | Department of Electronic Materials Engineering, Kwangwoon University() |
| 2nd Author's Name | Woo-Hyun Lee |
| 2nd Author's Affiliation | Department of Electronic Materials Engineering, Kwangwoon University |
| 3rd Author's Name | Hyun-Mo Goo |
| 3rd Author's Affiliation | Department of Electronic Materials Engineering, Kwangwoon University |
| 4th Author's Name | Chang-Geun Ahn |
| 4th Author's Affiliation | Nano Bio-electric Devices Team, IT Convergence & Components Laboratory |
| 5th Author's Name | Jong-Heon Yang |
| 5th Author's Affiliation | Nano Bio-electric Devices Team, IT Convergence & Components Laboratory |
| 6th Author's Name | In-Bok Baek |
| 6th Author's Affiliation | Nano Bio-electric Devices Team, IT Convergence & Components Laboratory |
| 7th Author's Name | Seong-jae Lee |
| 7th Author's Affiliation | Nano Bio-electric Devices Team, IT Convergence & Components Laboratory |
| Date | 2006/6/26 |
| Paper # | ED2006-72,SDM2006-80 |
| Volume (vol) | vol.106 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |