| Presentation | 2006/6/26 Modified Saddle MOSFETs for Sub-50nm DRAM Technology(Session 1 Silicon Devices I,AWAD2006) Ki-Heung Park, Jong-Ho Lee, |
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| PDF Download Page | PDF download Page Link | |
| Abstract(in Japanese) | (See Japanese page) | |
| Abstract(in English) | A new MOS device (called modified Saddle MOSFET) with recess channel and side-gate was proposed, and key features of the device were characterized through 3-dimensional device simulation for the first time. The Saddle MOSFET structure was modified to have smaller GIDL and lower source/drain to gate overlap capacitance. It was about 21% lower gate capacitance and lower I_| ) sensitivity with the corner shape than conventional recess channel devices, and shown lower gate delay time (CV/I) by～30% than the conventional devices while keeping nearly the same I_ | |
| Keyword(in Japanese) | (See Japanese page) | |
| Keyword(in English) | Saddle MOSFET / side-gate / recess channel / gate-induced-drain-leakage (GIDL) / DRAM | |
| Paper # | ED2006-60,SDM2006-68 | |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/6/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Modified Saddle MOSFETs for Sub-50nm DRAM Technology(Session 1 Silicon Devices I,AWAD2006) |
| Sub Title (in English) | |
| Keyword(1) | Saddle MOSFET |
| Keyword(2) | side-gate |
| Keyword(3) | recess channel |
| Keyword(4) | gate-induced-drain-leakage (GIDL) |
| Keyword(5) | DRAM |
| 1st Author's Name | Ki-Heung Park |
| 1st Author's Affiliation | School of EECS, Kyungpook National University() |
| 2nd Author's Name | Jong-Ho Lee |
| 2nd Author's Affiliation | School of EECS, Kyungpook National University |
| Date | 2006/6/26 |
| Paper # | ED2006-60,SDM2006-68 |
| Volume (vol) | vol.106 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |