| Presentation | 2006/6/26 Device and Substrate Technologies for Advanced CMOS with Mobility Enhancement(Session 1 Silicon Devices I,AWAD2006) Shin-ichi TAKAGI, Tsutomu TEZUKA, Toshifumi IRISAWA, Shu NAKAHARAI, Toshinori NUMATA, Naoharu SUGIYAMA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Mobility enhancement technologies have currently been recognized as mandatory for future scaled MOSFETs. In this paper, we review our recent results on the development of mobility-enhanced device structures using strained-Si/SiGe/Ge MOS channels and the carrier transport properties in those channels. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CMOS / Mobility / strained Si / SiGe / Ge / strain |
| Paper # | ED2006-59,SDM2006-67 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/6/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Device and Substrate Technologies for Advanced CMOS with Mobility Enhancement(Session 1 Silicon Devices I,AWAD2006) |
| Sub Title (in English) | |
| Keyword(1) | CMOS |
| Keyword(2) | Mobility |
| Keyword(3) | strained Si |
| Keyword(4) | SiGe |
| Keyword(5) | Ge |
| Keyword(6) | strain |
| 1st Author's Name | Shin-ichi TAKAGI |
| 1st Author's Affiliation | MIRAI-AIST:The University of Tokyo() |
| 2nd Author's Name | Tsutomu TEZUKA |
| 2nd Author's Affiliation | MIRAI-ASET |
| 3rd Author's Name | Toshifumi IRISAWA |
| 3rd Author's Affiliation | MIRAI-ASET |
| 4th Author's Name | Shu NAKAHARAI |
| 4th Author's Affiliation | MIRAI-ASET |
| 5th Author's Name | Toshinori NUMATA |
| 5th Author's Affiliation | MIRAI-ASET |
| 6th Author's Name | Naoharu SUGIYAMA |
| 6th Author's Affiliation | MIRAI-ASET |
| Date | 2006/6/26 |
| Paper # | ED2006-59,SDM2006-67 |
| Volume (vol) | vol.106 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |