| Presentation | 2006/6/29 Study of thermal oxidation on Al thin film of spin tunneling junctions Masahiro MORIZUMI, Kazuo SHIIKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this research thermal oxidation has pointed for making method of insulator AlO_x. Composition of insulator AlO_x was analyzed by XPS. Electric characteristics of spin tunneling junctions which have insulator AlO_x fabricated by thermal oxidation was investigated. From XPS, the composition of AlO_x has changed AlO_2 to Al_2O_3 when oxidize temperature is high. From the value of relative dielectric constants, also support that high temperature oxidation brings value of relative dielectric constants to bulk Al_2O_3 especially by 473K oxidation. Resistance, barrier height and breakdown voltage increases. This is because high temperature oxidation makes uniformity insulator and less defects. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Spin tunneling junction / Thermal oxidation / AlO_x / XPS / Breakdown |
| Paper # | MR2006-17 |
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| Conference Information | |
| Committee | MR |
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| Conference Date | 2006/6/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Magnetic Recording (MR) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of thermal oxidation on Al thin film of spin tunneling junctions |
| Sub Title (in English) | |
| Keyword(1) | Spin tunneling junction |
| Keyword(2) | Thermal oxidation |
| Keyword(3) | AlO_x |
| Keyword(4) | XPS |
| Keyword(5) | Breakdown |
| 1st Author's Name | Masahiro MORIZUMI |
| 1st Author's Affiliation | Department of Applied Physics and Physicθinformatics, Keio University() |
| 2nd Author's Name | Kazuo SHIIKI |
| 2nd Author's Affiliation | Department of Applied Physics and Physicθinformatics, Keio University |
| Date | 2006/6/29 |
| Paper # | MR2006-17 |
| Volume (vol) | vol.106 |
| Number (no) | 142 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |