| Presentation | 2006-06-02 A Real Time Monitoring System for Laser Microprocessing Nasrullah IDRIS, Takao KOBAYASI, Kiichiro KAGAWA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A monitoring system for laser microprocessing has been designed and constructed based on the view point that the characteristics of laser processing inherently relates to the characteristics of laser plasma. The system integrates 5 monitoring functions including optical and electromagnetic methods. It was found that induced current is very useful as an unique monitoring method for laser processing. This induced current method has many potential applications in laser microprocessing such as for estimation of the ablated amount, observation of layer removal, detection of the moment at when laser beam penetrates the sample, and also for determination of precise tight focusing position of the lens, in real time. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | laser microprocessing / monitoring system / induced current |
| Paper # | LQE2006-3 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2006/5/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Real Time Monitoring System for Laser Microprocessing |
| Sub Title (in English) | |
| Keyword(1) | laser microprocessing |
| Keyword(2) | monitoring system |
| Keyword(3) | induced current |
| 1st Author's Name | Nasrullah IDRIS |
| 1st Author's Affiliation | Department of Fiber Amenity Engineering, Graduate School of Engineering, Fukui University() |
| 2nd Author's Name | Takao KOBAYASI |
| 2nd Author's Affiliation | Department of Physics, Faculty of Education and Regional Studies, Fukui University |
| 3rd Author's Name | Kiichiro KAGAWA |
| 3rd Author's Affiliation | Department of Fiber Amenity Engineering, Graduate School of Engineering, Fukui University |
| Date | 2006-06-02 |
| Paper # | LQE2006-3 |
| Volume (vol) | vol.106 |
| Number (no) | 90 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |