Presentation | 2006-06-02 Hybrid System for Measuring Both Surface Undulation and Roughness by Means of Laser Reflection and Imaging Tomotaka KOZUKI, Qin SHU, Yasunori TOUMA, Hiroshi SUGA, Kazuhiko ISHIKAWA, Tetsuma SAKURAI, Masahiro UEDA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A hybrid system for measuring both surface undulation and surface roughness has been proposed by means of laser reflection and laser scattering. Two main subsystems are incorporated in a body; i.e., it is a hybrid system, with one subsystem based on a laser reflection and used for measuring a surface undulation on a mirror-like surface, and the other based on. an imaging of the irradiated portion and used for a surface roughness on a rough surface. It was found that the subsystem for surface undulation has a spatial resolution of 1nm with a measurement frequency of 24Hz, and that the subsystem for roughness has a spatial resolution of 2μm with a measurement frequency of about 100Hz. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Real-time measurement / Surface undulation / Surface roughness / Laser reflection / Laser scattering |
Paper # | LQE2006-1 |
Date of Issue |
Conference Information | |
Committee | LQE |
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Conference Date | 2006/5/26(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
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Assistant |
Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Hybrid System for Measuring Both Surface Undulation and Roughness by Means of Laser Reflection and Imaging |
Sub Title (in English) | |
Keyword(1) | Real-time measurement |
Keyword(2) | Surface undulation |
Keyword(3) | Surface roughness |
Keyword(4) | Laser reflection |
Keyword(5) | Laser scattering |
1st Author's Name | Tomotaka KOZUKI |
1st Author's Affiliation | Fiber Amenity Engineering, Faculty of Engineering, University of Fukui() |
2nd Author's Name | Qin SHU |
2nd Author's Affiliation | Fiber Amenity Engineering, Faculty of Engineering, University of Fukui |
3rd Author's Name | Yasunori TOUMA |
3rd Author's Affiliation | Hokkei Industries Co. Ltd. |
4th Author's Name | Hiroshi SUGA |
4th Author's Affiliation | Faculty of Infrastructural of Technologies, Hiroshima International University |
5th Author's Name | Kazuhiko ISHIKAWA |
5th Author's Affiliation | Electro-Information Engineering, Fukui National College of Technology |
6th Author's Name | Tetsuma SAKURAI |
6th Author's Affiliation | Fiber Amenity Engineering, Faculty of Engineering, University of Fukui |
7th Author's Name | Masahiro UEDA |
7th Author's Affiliation | Faculty of Education and Regional Studies, University of Fukui |
Date | 2006-06-02 |
Paper # | LQE2006-1 |
Volume (vol) | vol.106 |
Number (no) | 90 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |