Presentation 2006-06-02
Hybrid System for Measuring Both Surface Undulation and Roughness by Means of Laser Reflection and Imaging
Tomotaka KOZUKI, Qin SHU, Yasunori TOUMA, Hiroshi SUGA, Kazuhiko ISHIKAWA, Tetsuma SAKURAI, Masahiro UEDA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A hybrid system for measuring both surface undulation and surface roughness has been proposed by means of laser reflection and laser scattering. Two main subsystems are incorporated in a body; i.e., it is a hybrid system, with one subsystem based on a laser reflection and used for measuring a surface undulation on a mirror-like surface, and the other based on. an imaging of the irradiated portion and used for a surface roughness on a rough surface. It was found that the subsystem for surface undulation has a spatial resolution of 1nm with a measurement frequency of 24Hz, and that the subsystem for roughness has a spatial resolution of 2μm with a measurement frequency of about 100Hz.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Real-time measurement / Surface undulation / Surface roughness / Laser reflection / Laser scattering
Paper # LQE2006-1
Date of Issue

Conference Information
Committee LQE
Conference Date 2006/5/26(1days)
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Paper Information
Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Hybrid System for Measuring Both Surface Undulation and Roughness by Means of Laser Reflection and Imaging
Sub Title (in English)
Keyword(1) Real-time measurement
Keyword(2) Surface undulation
Keyword(3) Surface roughness
Keyword(4) Laser reflection
Keyword(5) Laser scattering
1st Author's Name Tomotaka KOZUKI
1st Author's Affiliation Fiber Amenity Engineering, Faculty of Engineering, University of Fukui()
2nd Author's Name Qin SHU
2nd Author's Affiliation Fiber Amenity Engineering, Faculty of Engineering, University of Fukui
3rd Author's Name Yasunori TOUMA
3rd Author's Affiliation Hokkei Industries Co. Ltd.
4th Author's Name Hiroshi SUGA
4th Author's Affiliation Faculty of Infrastructural of Technologies, Hiroshima International University
5th Author's Name Kazuhiko ISHIKAWA
5th Author's Affiliation Electro-Information Engineering, Fukui National College of Technology
6th Author's Name Tetsuma SAKURAI
6th Author's Affiliation Fiber Amenity Engineering, Faculty of Engineering, University of Fukui
7th Author's Name Masahiro UEDA
7th Author's Affiliation Faculty of Education and Regional Studies, University of Fukui
Date 2006-06-02
Paper # LQE2006-1
Volume (vol) vol.106
Number (no) 90
Page pp.pp.-
#Pages 6
Date of Issue