| Presentation | 2006-06-02 Hybrid System for Measuring Both Surface Undulation and Roughness by Means of Laser Reflection and Imaging Tomotaka KOZUKI, Qin SHU, Yasunori TOUMA, Hiroshi SUGA, Kazuhiko ISHIKAWA, Tetsuma SAKURAI, Masahiro UEDA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A hybrid system for measuring both surface undulation and surface roughness has been proposed by means of laser reflection and laser scattering. Two main subsystems are incorporated in a body; i.e., it is a hybrid system, with one subsystem based on a laser reflection and used for measuring a surface undulation on a mirror-like surface, and the other based on. an imaging of the irradiated portion and used for a surface roughness on a rough surface. It was found that the subsystem for surface undulation has a spatial resolution of 1nm with a measurement frequency of 24Hz, and that the subsystem for roughness has a spatial resolution of 2μm with a measurement frequency of about 100Hz. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Real-time measurement / Surface undulation / Surface roughness / Laser reflection / Laser scattering |
| Paper # | LQE2006-1 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2006/5/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Hybrid System for Measuring Both Surface Undulation and Roughness by Means of Laser Reflection and Imaging |
| Sub Title (in English) | |
| Keyword(1) | Real-time measurement |
| Keyword(2) | Surface undulation |
| Keyword(3) | Surface roughness |
| Keyword(4) | Laser reflection |
| Keyword(5) | Laser scattering |
| 1st Author's Name | Tomotaka KOZUKI |
| 1st Author's Affiliation | Fiber Amenity Engineering, Faculty of Engineering, University of Fukui() |
| 2nd Author's Name | Qin SHU |
| 2nd Author's Affiliation | Fiber Amenity Engineering, Faculty of Engineering, University of Fukui |
| 3rd Author's Name | Yasunori TOUMA |
| 3rd Author's Affiliation | Hokkei Industries Co. Ltd. |
| 4th Author's Name | Hiroshi SUGA |
| 4th Author's Affiliation | Faculty of Infrastructural of Technologies, Hiroshima International University |
| 5th Author's Name | Kazuhiko ISHIKAWA |
| 5th Author's Affiliation | Electro-Information Engineering, Fukui National College of Technology |
| 6th Author's Name | Tetsuma SAKURAI |
| 6th Author's Affiliation | Fiber Amenity Engineering, Faculty of Engineering, University of Fukui |
| 7th Author's Name | Masahiro UEDA |
| 7th Author's Affiliation | Faculty of Education and Regional Studies, University of Fukui |
| Date | 2006-06-02 |
| Paper # | LQE2006-1 |
| Volume (vol) | vol.106 |
| Number (no) | 90 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |