Presentation 2006-06-30
Structure analysis of deposition polymerized thin film by in situ IR spectroscopy
Kenji NAKAO, Kuniaki TANAKA, Hiroaki USUI,
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Abstract(in English) Polymeric thin films were obtained by electron-assisted deposition of zinc acrylate (ZA) and fluorinated alkyl acrylate (EFUA) monomers. The film growth process and thermal stability of the films were analyzed by using in-situ IR analysis. It was found that the polymerization reaction can be enhanced by electron irradiation in the course of deposition. The polymerization was achieved from the initial stage of film growth. The electron-assisted deposition of ZA produced polymeric films that was not affected by post-deposition annealing in vacuum. On the other hand, the conventionally evaporated ZA film underwent solid phase polymerization and reevaporation by the post-deposition annealing. EFUA polymer films were prepared by the electron-assisted deposition only when the substrate temperature was cooled to subfreezing temperature, while co-evaporation of ZA and EFUA enabled formation of polymer films without cooling the substrate.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) deposition polymerization / co-deposition / zinc-acrylate / fluoro-alkyl acrylate / in-situ IR analysis
Paper # EMD2006-5,CPM2006-29,OME2006-39
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Conference Information
Committee CPM
Conference Date 2006/6/23(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Structure analysis of deposition polymerized thin film by in situ IR spectroscopy
Sub Title (in English)
Keyword(1) deposition polymerization
Keyword(2) co-deposition
Keyword(3) zinc-acrylate
Keyword(4) fluoro-alkyl acrylate
Keyword(5) in-situ IR analysis
1st Author's Name Kenji NAKAO
1st Author's Affiliation Faculty of Engineering, Tokyo University of Agriculture & Technology()
2nd Author's Name Kuniaki TANAKA
2nd Author's Affiliation Faculty of Engineering, Tokyo University of Agriculture & Technology
3rd Author's Name Hiroaki USUI
3rd Author's Affiliation Faculty of Engineering, Tokyo University of Agriculture & Technology
Date 2006-06-30
Paper # EMD2006-5,CPM2006-29,OME2006-39
Volume (vol) vol.106
Number (no) 131
Page pp.pp.-
#Pages 6
Date of Issue