| Presentation | 2006-05-19 Tunneling current oscillations in Si/SiO_2/Si structures Daniel MORARU, Daisuki NAGATA, Seiji HORIGUCHI, Ratno NURYADI, Hiroya IKEDA, Michiharu TABE, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Current oscillations in the Fowler-Nordheim tunneling regime are investigated for Si/SiO_2/Si structures obtained by a wafer bonding technique. These oscillations arise from the interference in the conduction band of SiO_2 of electron waves after reflection at the SiO_2/Si collecting interface. The temperature dependence of the amplitude of these oscillations gives an insight on the behavior of scattering mechanisms in the amorphous thermally grown SiO_2. This fact has been confirmed by the results obtained for metal-oxide-semiconductor reference structures. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Fowler-Nordheim Current Oscillations (FNCOs) / Fowler-Nordheim Tunneling (FNT) / Scattering |
| Paper # | ED2006-40,CPM2006-27,SDM2006-40 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/5/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Tunneling current oscillations in Si/SiO_2/Si structures |
| Sub Title (in English) | |
| Keyword(1) | Fowler-Nordheim Current Oscillations (FNCOs) |
| Keyword(2) | Fowler-Nordheim Tunneling (FNT) |
| Keyword(3) | Scattering |
| 1st Author's Name | Daniel MORARU |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Daisuki NAGATA |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Seiji HORIGUCHI |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Akita University |
| 4th Author's Name | Ratno NURYADI |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Hiroya IKEDA |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 6th Author's Name | Michiharu TABE |
| 6th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2006-05-19 |
| Paper # | ED2006-40,CPM2006-27,SDM2006-40 |
| Volume (vol) | vol.106 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |