Presentation	2006-05-19 Microstructure of group-III nitride semiconductors grown on m-plane SiC Tetsuya Nagai, Takeshi Kawashima, Kiyotaka Nakano, Masataka Imura, Motoaki Iwaya, Satoshi Kamiyama, Hiroshi Amano, Isamu Akasaki,
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Abstract(in English)	In order to reduce internal electric field caused by the piezoelectricity, nitride-based LEDs are fabricated on non-polar plane substrates. Reduction of defects such as dislocations or stacking faults is essential for the realization of the highly efficient LEDs. In this report, microstructure of group-III nitride layers grown on 4H-SiC substrates are studied by TEM.
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Keyword(in English)	non-polar nitrides / m-plane SiC / transmission electron microscope (TEM)
Paper #	ED2006-29,CPM2006-16,SDM2006-29
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Committee	CPM
Conference Date	2006/5/11(1days)
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Registration To	Component Parts and Materials (CPM)
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	Microstructure of group-III nitride semiconductors grown on m-plane SiC
Sub Title (in English)
Keyword(1)	non-polar nitrides
Keyword(2)	m-plane SiC
Keyword(3)	transmission electron microscope (TEM)
1st Author's Name	Tetsuya Nagai
1st Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University()
2nd Author's Name	Takeshi Kawashima
2nd Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University
3rd Author's Name	Kiyotaka Nakano
3rd Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University
4th Author's Name	Masataka Imura
4th Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University
5th Author's Name	Motoaki Iwaya
5th Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University
6th Author's Name	Satoshi Kamiyama
6th Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University
7th Author's Name	Hiroshi Amano
7th Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University
8th Author's Name	Isamu Akasaki
8th Author's Affiliation	Faculty of Science and Technology, 21^-Century COE Program "Nano-Factory", Meijo University
Date	2006-05-19
Paper #	ED2006-29,CPM2006-16,SDM2006-29
Volume (vol)	vol.106
Number (no)	46
Page	pp.pp.-
#Pages	4
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