Presentation | 2006-05-18 Fabrication and Characterization of infrared Photonic Crystal structure on Micro-patterned Si substrate Takeharu Ishii, Fumiaki Matsuoka, Hideto Miyake, Kazumasa Hiramatsu, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In this study, 2D Photonic Crystals (PCs) were micro-patterned on Si substrate. As a result, selective wavelength control of about 11μm was obtained. Additionally, We obtained maximum emissivity of 79% by etching with mixed liquid of HF:HNO_3:H_2O. By investigation of Au deposition effect, it was found that the emissivity and wavelength selectivity depend on Au deposition on the side wall. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Si / Photonic Crystal / infrared region / micro-patterned |
Paper # | ED2006-28,CPM2006-15,SDM2006-28 |
Date of Issue |
Conference Information | |
Committee | CPM |
---|---|
Conference Date | 2006/5/11(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication and Characterization of infrared Photonic Crystal structure on Micro-patterned Si substrate |
Sub Title (in English) | |
Keyword(1) | Si |
Keyword(2) | Photonic Crystal |
Keyword(3) | infrared region |
Keyword(4) | micro-patterned |
1st Author's Name | Takeharu Ishii |
1st Author's Affiliation | Faculty of Eng., Mie University() |
2nd Author's Name | Fumiaki Matsuoka |
2nd Author's Affiliation | Faculty of Eng., Mie University |
3rd Author's Name | Hideto Miyake |
3rd Author's Affiliation | Faculty of Eng., Mie University |
4th Author's Name | Kazumasa Hiramatsu |
4th Author's Affiliation | Faculty of Eng., Mie University |
Date | 2006-05-18 |
Paper # | ED2006-28,CPM2006-15,SDM2006-28 |
Volume (vol) | vol.106 |
Number (no) | 46 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |