Presentation 2006-05-18
Fabrication and Characterization of infrared Photonic Crystal structure on Micro-patterned Si substrate
Takeharu Ishii, Fumiaki Matsuoka, Hideto Miyake, Kazumasa Hiramatsu,
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Abstract(in English) In this study, 2D Photonic Crystals (PCs) were micro-patterned on Si substrate. As a result, selective wavelength control of about 11μm was obtained. Additionally, We obtained maximum emissivity of 79% by etching with mixed liquid of HF:HNO_3:H_2O. By investigation of Au deposition effect, it was found that the emissivity and wavelength selectivity depend on Au deposition on the side wall.
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Keyword(in English) Si / Photonic Crystal / infrared region / micro-patterned
Paper # ED2006-28,CPM2006-15,SDM2006-28
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Committee CPM
Conference Date 2006/5/11(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and Characterization of infrared Photonic Crystal structure on Micro-patterned Si substrate
Sub Title (in English)
Keyword(1) Si
Keyword(2) Photonic Crystal
Keyword(3) infrared region
Keyword(4) micro-patterned
1st Author's Name Takeharu Ishii
1st Author's Affiliation Faculty of Eng., Mie University()
2nd Author's Name Fumiaki Matsuoka
2nd Author's Affiliation Faculty of Eng., Mie University
3rd Author's Name Hideto Miyake
3rd Author's Affiliation Faculty of Eng., Mie University
4th Author's Name Kazumasa Hiramatsu
4th Author's Affiliation Faculty of Eng., Mie University
Date 2006-05-18
Paper # ED2006-28,CPM2006-15,SDM2006-28
Volume (vol) vol.106
Number (no) 46
Page pp.pp.-
#Pages 6
Date of Issue