| Presentation | 2006-05-18 Influence of Annealing Conditions on the Sensing Properties of Oxygen Gas Sensor with β-Ga_2O_3 Films Deposited by CSD Method for High Temperatures Marilena Bartic, Cristian-Ioan Baban, Masaaki Isai, Masami Ogita, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Gallium oxide oxygen gas sensors have been investigated at the high temperature of 1000℃. An attention was paid for the influence of annealing conditions on the oxygen sensing mechanism of β-Ga_2O_3 thin film. In order to analyze the characteristics of the sensors (stability, sensitivity, response time) we have prepared β-Ga_2O_3 thin film using chemical solution deposition method (CSD). From AFM images and XRD patterns we have found out that the temperature and the time scale of annealing process influence the physical properties of β-Ga_2O_3 thin films. Gallium oxide prepared using CSD method makes it possible to detect oxygen in the gas stream mixture at high temperatures over 1000℃. It was found that the response time is in the range of seconds at 1000℃. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | gallium oxide / CSD-method / annealing / oxygen sensors / high temperature |
| Paper # | ED2006-22,CPM2006-9,SDM2006-22 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/5/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Influence of Annealing Conditions on the Sensing Properties of Oxygen Gas Sensor with β-Ga_2O_3 Films Deposited by CSD Method for High Temperatures |
| Sub Title (in English) | |
| Keyword(1) | gallium oxide |
| Keyword(2) | CSD-method |
| Keyword(3) | annealing |
| Keyword(4) | oxygen sensors |
| Keyword(5) | high temperature |
| 1st Author's Name | Marilena Bartic |
| 1st Author's Affiliation | GSEST of Shizuoka University() |
| 2nd Author's Name | Cristian-Ioan Baban |
| 2nd Author's Affiliation | Faculty of Physics, Al. I. Cuza University |
| 3rd Author's Name | Masaaki Isai |
| 3rd Author's Affiliation | GSEST of Shizuoka University |
| 4th Author's Name | Masami Ogita |
| 4th Author's Affiliation | GSEST of Shizuoka University |
| Date | 2006-05-18 |
| Paper # | ED2006-22,CPM2006-9,SDM2006-22 |
| Volume (vol) | vol.106 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |