| Presentation | 2006-04-21 Mechanical Dynamic Gain Equalizer using MEMS Actuator Array Ikuo KUMAGAYA, Nobuhito KINOSHITA, Satoshi KONISHI, Tomomi SANO, Makoto KATAYAMA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper reports MEMS based mechanical dynamic gain equalizer (hereafter DGEQ) which is expected to equalize non-uniformities of spectral intensity in WDM transportation. Batch-fabricated multi sliders for DGEQ are presented as optical application of electrostatic controlled linear inchworm actuator (hereafter ECLIA). 8 multi sliders (600μm wide) corresponding to 8 channels are fabricated by DRIE and bonded on a pyrex glass substrate for a reliable electrical isolation. Operating of developed multi sliders and their optical attenuation as DGEQ will be reported in succession to design and fabrication of device. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ECLIA / DGEQ / Arrayed sliders / Batch fabrication / Parallel motion / WDM |
| Paper # | R2006-2,CPM2006-2,OPE2006-2 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2006/4/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Mechanical Dynamic Gain Equalizer using MEMS Actuator Array |
| Sub Title (in English) | |
| Keyword(1) | ECLIA |
| Keyword(2) | DGEQ |
| Keyword(3) | Arrayed sliders |
| Keyword(4) | Batch fabrication |
| Keyword(5) | Parallel motion |
| Keyword(6) | WDM |
| 1st Author's Name | Ikuo KUMAGAYA |
| 1st Author's Affiliation | Science and Engineering, Ritsumeikan University() |
| 2nd Author's Name | Nobuhito KINOSHITA |
| 2nd Author's Affiliation | Science and Engineering, Ritsumeikan University |
| 3rd Author's Name | Satoshi KONISHI |
| 3rd Author's Affiliation | Science and Engineering, Ritsumeikan University |
| 4th Author's Name | Tomomi SANO |
| 4th Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| 5th Author's Name | Makoto KATAYAMA |
| 5th Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| Date | 2006-04-21 |
| Paper # | R2006-2,CPM2006-2,OPE2006-2 |
| Volume (vol) | vol.106 |
| Number (no) | 19 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |