| Presentation | 2006/4/10 Low-Temperature Solid-Phase Crystallization of Amorphous SiGe Films on Glass by Metal Catalytic Effect Hiroshi KANNO, Atsushi KENJO, Taizoh SADOH, Masanobu MIYAO, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Metal-induced lateral crystallization (MILC) of amorphous Si_<1-x>Ge_x (0≦x≦1) on SiO_2 has been investigated to achieve future system-in-displays. Crystal growth morphology drastically changed with Ge fraction, and their growth velocities could be enhanced by applying an electric field during annealing. In addition, the directional growth aligned to the electric field was found under extremely high electric fields (>2000V/cm). These new findings will be a powerful tool to obtain new poly-SiGe films with highly controlled crystal structures. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | metal-induced lateral crystallization / silicon germanium / thin-film transistor / low-temperature crystallization / electric-field-induced crystallization |
| Paper # | ED2006-2,SDM2006-2,OME2006-2 |
| Date of Issue |
| Conference Information | |
| Committee | OME |
|---|---|
| Conference Date | 2006/4/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low-Temperature Solid-Phase Crystallization of Amorphous SiGe Films on Glass by Metal Catalytic Effect |
| Sub Title (in English) | |
| Keyword(1) | metal-induced lateral crystallization |
| Keyword(2) | silicon germanium |
| Keyword(3) | thin-film transistor |
| Keyword(4) | low-temperature crystallization |
| Keyword(5) | electric-field-induced crystallization |
| 1st Author's Name | Hiroshi KANNO |
| 1st Author's Affiliation | Department of Electronics, Kyushu University() |
| 2nd Author's Name | Atsushi KENJO |
| 2nd Author's Affiliation | Department of Electronics, Kyushu University |
| 3rd Author's Name | Taizoh SADOH |
| 3rd Author's Affiliation | Department of Electronics, Kyushu University |
| 4th Author's Name | Masanobu MIYAO |
| 4th Author's Affiliation | Department of Electronics, Kyushu University |
| Date | 2006/4/10 |
| Paper # | ED2006-2,SDM2006-2,OME2006-2 |
| Volume (vol) | vol.106 |
| Number (no) | 7 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |