| Presentation | 2006-03-03 Development of Torsional-Mode RF-MEMS Filter Akinori HASHIMURA, Kunihiko NAKAMURA, Yasuyuki NAITO, Yoshito NAKANISHI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper proposes the investigation of high Q torsional-mode MEMS filter that can be integrated in RF front-end for future mobile terminal applications. We have focused on resolving the issue of support loss in micro-scale beam resonators to improve the Q factor. A torsional-mode beam resonator that was fabricated using anisotropic etching by crystallization technique demonstrated the Q factor of 14600, which is 2X larger than achieved by the flexural-mode resonance counterpart. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / filter / resonator / torsional-mode resonance / single-crystal silicon |
| Paper # | MW2005-185 |
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| Conference Information | |
| Committee | MW |
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| Conference Date | 2006/2/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Torsional-Mode RF-MEMS Filter |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | filter |
| Keyword(3) | resonator |
| Keyword(4) | torsional-mode resonance |
| Keyword(5) | single-crystal silicon |
| 1st Author's Name | Akinori HASHIMURA |
| 1st Author's Affiliation | Network Development Center, Matsushita Electric Industrial Co., Ltd.() |
| 2nd Author's Name | Kunihiko NAKAMURA |
| 2nd Author's Affiliation | Network Development Center, Matsushita Electric Industrial Co., Ltd. |
| 3rd Author's Name | Yasuyuki NAITO |
| 3rd Author's Affiliation | Network Development Center, Matsushita Electric Industrial Co., Ltd. |
| 4th Author's Name | Yoshito NAKANISHI |
| 4th Author's Affiliation | Network Development Center, Matsushita Electric Industrial Co., Ltd. |
| Date | 2006-03-03 |
| Paper # | MW2005-185 |
| Volume (vol) | vol.105 |
| Number (no) | 626 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |