| Presentation | 2006/3/10 A Character Size Optimization for Increasing the Throughput of Character Projection Lithography Makoto SUGIHARA, Taiga TAKATA, Kenta NAKAMURA, Yusuke MATSUNAGA, Kazuaki MURAKAMI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose a character size optimization technique to enhance the throughput of maskless lithography as well as photomask manufacture. The number of electron beam shots to draw the patterns of circuits is a dominant factor in the manufacture time and the cost for devices. Our technique is capable of drastically reducing them by optimizing the size of characters, which are the patterns to project and are placed on CP masks. Experimental results show that our technique reduced 72.0% of EB shots in the best case, comparing with the ad hoc character sizing. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | character projection / maskless lithography / photomask development / throughput / variable shaped beam |
| Paper # | CPSY2005-79,DC2005-99 |
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| Conference Information | |
| Committee | DC |
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| Conference Date | 2006/3/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Dependable Computing (DC) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Character Size Optimization for Increasing the Throughput of Character Projection Lithography |
| Sub Title (in English) | |
| Keyword(1) | character projection |
| Keyword(2) | maskless lithography |
| Keyword(3) | photomask development |
| Keyword(4) | throughput |
| Keyword(5) | variable shaped beam |
| 1st Author's Name | Makoto SUGIHARA |
| 1st Author's Affiliation | ISIT() |
| 2nd Author's Name | Taiga TAKATA |
| 2nd Author's Affiliation | Department of Informatics, Gradudate School of Information Science and Electrical Engineering, Kyushu University |
| 3rd Author's Name | Kenta NAKAMURA |
| 3rd Author's Affiliation | Department of Computer Science and Communication Engineering, Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 4th Author's Name | Yusuke MATSUNAGA |
| 4th Author's Affiliation | Department of Informatics, Gradudate School of Information Science and Electrical Engineering, Kyushu University |
| 5th Author's Name | Kazuaki MURAKAMI |
| 5th Author's Affiliation | Department of Computer Science and Communication Engineering, Graduate School of Information Science and Electrical Engineering, Kyushu University |
| Date | 2006/3/10 |
| Paper # | CPSY2005-79,DC2005-99 |
| Volume (vol) | vol.105 |
| Number (no) | 672 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |