| Presentation | 2006-02-17 Fabrication of amorphous Si/SiO_2 superlattices by using RF sputtering and their luminescence properties Yuji KATO, Takeshi TANEMURA, Hitomi HOSHINO, Kenta MIURA, Osamu HANAIZUMI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We made a comparative study on luminescent properties of amorphous Si/SiO_2 superlattices fabricated by using RF sputtering having various thickness of Si and SiO2 layers. The samples showed a tendency that their photoluminescence (PL) peaks shift to low photon energy for the Si content of the superlattice after annealing at 1100℃. Moreover, we found that they showed ultraviolet PL part at room temperature after annealing 1150℃ to 1250℃. The PL peak position was 3.4eV and the full width half maximum(FWHM) was 0.20eV. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | superlattice / red photoluminescence / urtlaviolet photoluminescence / amorphous Si / SiO_2 / RF sputtering |
| Paper # | OPE2005-152 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2006/2/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of amorphous Si/SiO_2 superlattices by using RF sputtering and their luminescence properties |
| Sub Title (in English) | |
| Keyword(1) | superlattice |
| Keyword(2) | red photoluminescence |
| Keyword(3) | urtlaviolet photoluminescence |
| Keyword(4) | amorphous Si |
| Keyword(5) | SiO_2 |
| Keyword(6) | RF sputtering |
| 1st Author's Name | Yuji KATO |
| 1st Author's Affiliation | Gunma University() |
| 2nd Author's Name | Takeshi TANEMURA |
| 2nd Author's Affiliation | Gunma University |
| 3rd Author's Name | Hitomi HOSHINO |
| 3rd Author's Affiliation | Gunma University |
| 4th Author's Name | Kenta MIURA |
| 4th Author's Affiliation | Gunma University |
| 5th Author's Name | Osamu HANAIZUMI |
| 5th Author's Affiliation | Gunma University |
| Date | 2006-02-17 |
| Paper # | OPE2005-152 |
| Volume (vol) | vol.105 |
| Number (no) | 606 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |