Presentation 2006/1/19
Fabrication of Liquid Crystal Display Panel driven by Bottom-contact-type OTFT
Yoshihide FUJISAKI, Toshiki Arai, Hiroshi Otake, Hirotaka Maruyama, Hideo FUJIKAKE, Youji INOUE, Shizuo TOKITO, Taiichiro KURITA,
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Abstract(in English) Organic TFT (OTFT)-driven 16×16 liquid crystal display panel on a flexible plastic film has been developed. We fabricated low voltage operation bottom-contact (BC) OTFT with Ta_2O_5 gate insulator by using photolithography method. BC-OTFT is suitable to fabricate scale-dawn TFTs, however, they have inferior performance compared with top-contact(TC) OTFT due to high contact-resistance, contamination and defects on the surface of the insulator. We introduced the surface treatments of the gate insulator, or O_2 plasma, UV cleaning and HMDS to improve the characteristics. The OTFT showed a carrier mobility of 0.3 cm^2/Vs, a current on/off ratio of over 10^6 and a low operating drain voltage of -6V. We also successively confirmed display operation of the fabricated 16×16 display panel with a low gate driving voltage of 13 volts.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Organic TFT / Bottom-Contact / Anodization / Gate Insulator / Driving of LC / Flexble Display
Paper # EID2005-44
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Committee EID
Conference Date 2006/1/19(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of Liquid Crystal Display Panel driven by Bottom-contact-type OTFT
Sub Title (in English)
Keyword(1) Organic TFT
Keyword(2) Bottom-Contact
Keyword(3) Anodization
Keyword(4) Gate Insulator
Keyword(5) Driving of LC
Keyword(6) Flexble Display
1st Author's Name Yoshihide FUJISAKI
1st Author's Affiliation NHK Science&Technical Research Laboratories()
2nd Author's Name Toshiki Arai
2nd Author's Affiliation NHK Science&Technical Research Laboratories
3rd Author's Name Hiroshi Otake
3rd Author's Affiliation NHK Science&Technical Research Laboratories
4th Author's Name Hirotaka Maruyama
4th Author's Affiliation NHK Science&Technical Research Laboratories
5th Author's Name Hideo FUJIKAKE
5th Author's Affiliation NHK Science&Technical Research Laboratories
6th Author's Name Youji INOUE
6th Author's Affiliation NHK Science&Technical Research Laboratories
7th Author's Name Shizuo TOKITO
7th Author's Affiliation NHK Science&Technical Research Laboratories
8th Author's Name Taiichiro KURITA
8th Author's Affiliation NHK Science&Technical Research Laboratories
Date 2006/1/19
Paper # EID2005-44
Volume (vol) vol.105
Number (no) 567
Page pp.pp.-
#Pages 4
Date of Issue