| Presentation | 2006/1/20 Control of Orientation for (100) Epitaxial ZnO Film and (001) Poly-crystal ZnO Film on Y-plane LiNbO_3 Substrate Michio Kadota, Yoshihiro Ito, Hideaki Kobayashi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A (001) orientated poly crystal ZnO Film is deposited on many kinds of substrates. However, an epitaxial ZnO film is deposited on only specific substrates, because they depend greatly on the lattice constant of the substrate. As an epitaxial ZnO film with c-axis orientated horizontally, only (110) orientated epitaxial ZnO Film on R-plane(01-12) sapphire or (11-20)LiTaO_3 substrate has been reported. A (100) orientated epitaxial ZnO film was deposited on a pre-treated Y-plane (010) LiNbO_3 substrate for the first time. A (001) orientated poly-crystal ZnO film was also deposited this substrate without the pre-treatment. Thus, two kinds of orientation directions could be controlled by the pre-treatment. Moreover their applications to the shear bulk wave transducer and surface acoustic wave devices are discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Y-plane LiNbO_3 / Control of orientation / (001)ZnO / (100) epitaxial ZnO / Shear bulk wave / SAW |
| Paper # | US2005-121 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2006/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Control of Orientation for (100) Epitaxial ZnO Film and (001) Poly-crystal ZnO Film on Y-plane LiNbO_3 Substrate |
| Sub Title (in English) | |
| Keyword(1) | Y-plane LiNbO_3 |
| Keyword(2) | Control of orientation |
| Keyword(3) | (001)ZnO |
| Keyword(4) | (100) epitaxial ZnO |
| Keyword(5) | Shear bulk wave |
| Keyword(6) | SAW |
| 1st Author's Name | Michio Kadota |
| 1st Author's Affiliation | Murata Mfg. Co., Ltd.() |
| 2nd Author's Name | Yoshihiro Ito |
| 2nd Author's Affiliation | Murata Mfg. Co., Ltd. |
| 3rd Author's Name | Hideaki Kobayashi |
| 3rd Author's Affiliation | Murata Mfg. Co., Ltd. |
| Date | 2006/1/20 |
| Paper # | US2005-121 |
| Volume (vol) | vol.105 |
| Number (no) | 554 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |