Presentation 2006-02-01
Design, fabrication and evaluation of feasible SOI rib waveguides with a medium mode size
Zhigang Wu, Kazuhiko Nakamura, Soichiro Honda, Katsuyuki Utaka, Tomohiko Edura, Masahide Tokuda, Ken Tsutsui, Yasuo Wada,
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Abstract(in English) SOI (silicon-on-insulator) wafers became popular platforms for photonic integration. Rib waveguides on the SOI wafers have been attracted more attentions due to the advantages, such as low loss, low polarization-dependence and easy fabrication. However, the conventional SOI rib waveguides with a large mode size suffer from bending loss, and the silicon-wire waveguide with a small mode size from a large transmission loss. Here we give a new design of a SOI rib waveguide with a medium mode size. For single-mode waveguides, the bending radius of the new SOI rib waveguide is 1/10 of that of a conventional SOI rib waveguide with a large mode size. In the case of the same surface roughness, the new SOI rib waveguide has a less transmission loss than the silicon-wire waveguide. We fabricated and evaluated the new SOI rib waveguides. The transmission loss and bending radius of the single-mode waveguide are 2dB/cm and 1mm, respectively. These results show that the SOI waveguides with a medium mode size are feasible ones for photonic integrated circuits.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Si waveguide / silicon-on-insulator (SOI) substrate / rib waveguide / mode size
Paper # PN2005-71,OFT2005-58,OPE2005-119,LQE2005-134
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Conference Information
Committee OFT
Conference Date 2006/1/25(1days)
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Registration To Optical Fiber Technology (OFT)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Design, fabrication and evaluation of feasible SOI rib waveguides with a medium mode size
Sub Title (in English)
Keyword(1) Si waveguide
Keyword(2) silicon-on-insulator (SOI) substrate
Keyword(3) rib waveguide
Keyword(4) mode size
1st Author's Name Zhigang Wu
1st Author's Affiliation School of Science and Engineer, WASEDA University()
2nd Author's Name Kazuhiko Nakamura
2nd Author's Affiliation School of Science and Engineer, WASEDA University
3rd Author's Name Soichiro Honda
3rd Author's Affiliation School of Science and Engineer, WASEDA University
4th Author's Name Katsuyuki Utaka
4th Author's Affiliation School of Science and Engineer, WASEDA University
5th Author's Name Tomohiko Edura
5th Author's Affiliation Nano-technology Research Laboratory, WASEDA University
6th Author's Name Masahide Tokuda
6th Author's Affiliation Nano-technology Research Laboratory, WASEDA University
7th Author's Name Ken Tsutsui
7th Author's Affiliation Nano-technology Research Laboratory, WASEDA University
8th Author's Name Yasuo Wada
8th Author's Affiliation Nano-technology Research Laboratory, WASEDA University
Date 2006-02-01
Paper # PN2005-71,OFT2005-58,OPE2005-119,LQE2005-134
Volume (vol) vol.105
Number (no) 586
Page pp.pp.-
#Pages 6
Date of Issue