Presentation 2006-02-02
Estimation of Rough Surface Parameters from Measured Surface Profile Data
Masahiko NISHIMOTO, Yusuke KIMURA,
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Abstract(in English) Since many naturally occurring surfaces have Gaussian height distribution, physical characteristics of them can be described by two kinds of roughness parameters alone, the root-mean-square (rms) height and correlation length. When we accurately estimate these parameters from measured surface height-profile, data samples with sufficiently long record length are required. However, the criterion of the data length required for accurate estimation of the parameters is not clear. In this report, we statistically estimate the error arising from the data length and check the results through a Monte Carlo simulation. From this analysis, we can confirm that for estimation of the rms height and correlation length with a precision of 10%, data lengths of 240lc and 270lc are required, respectively, where lc is the true value of the correlation length.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) rough surface / root mean square height / correlation length
Paper # PN2005-86,OFT2005-73,OPE2005-134,LQE2005-149
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Committee LQE
Conference Date 2006/1/26(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Estimation of Rough Surface Parameters from Measured Surface Profile Data
Sub Title (in English)
Keyword(1) rough surface
Keyword(2) root mean square height
Keyword(3) correlation length
1st Author's Name Masahiko NISHIMOTO
1st Author's Affiliation Faculty of Engineering, Kumamoto University()
2nd Author's Name Yusuke KIMURA
2nd Author's Affiliation Faculty of Engineering, Kumamoto University
Date 2006-02-02
Paper # PN2005-86,OFT2005-73,OPE2005-134,LQE2005-149
Volume (vol) vol.105
Number (no) 593
Page pp.pp.-
#Pages 6
Date of Issue