Presentation 2006-02-01
Microstructures formed on glass with a focused femtosecond laser pulse
Yoshio HAYASAKI, Daiki KAWAMURA, Nobuo NISHIDA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Morphology of a glass surface processed with a focused femtosecond laser pulse by applying a transparent coating is investigated. The transparent coating is implemented with poly-methyl methacrylate (PMMA). A thick PMMA film with the thickness that the surface is not ablated when a single pulse is focused to the glass-polymer interface reduces undesired thermal damage and debris. A submicrometer-sized cavity is produced with a reduction of debris and thermal damages. The coating thickness changes an amount of molecules in the focal volume, consequently an effect of plasma shielding changes. The PMMA film coated on the glass with thinner than the focus depth to increase a shielding effect makes a bump by positive use of glass melting.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Femtosecond laser processing / three-dimensional processing / optical device / bump / nanostructure
Paper # PN2005-80,OFT2005-67,OPE2005-128,LQE2005-143
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Committee LQE
Conference Date 2006/1/25(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Microstructures formed on glass with a focused femtosecond laser pulse
Sub Title (in English)
Keyword(1) Femtosecond laser processing
Keyword(2) three-dimensional processing
Keyword(3) optical device
Keyword(4) bump
Keyword(5) nanostructure
1st Author's Name Yoshio HAYASAKI
1st Author's Affiliation Faculty of Engineering, The University of Tokushima()
2nd Author's Name Daiki KAWAMURA
2nd Author's Affiliation Faculty of Engineering, The University of Tokushima
3rd Author's Name Nobuo NISHIDA
3rd Author's Affiliation Faculty of Engineering, The University of Tokushima
Date 2006-02-01
Paper # PN2005-80,OFT2005-67,OPE2005-128,LQE2005-143
Volume (vol) vol.105
Number (no) 592
Page pp.pp.-
#Pages 6
Date of Issue