Presentation | 2006-02-01 Design, fabrication and evaluation of feasible SOI rib waveguides with a medium mode size Zhigang Wu, Kazuhiko Nakamura, Soichiro Honda, Katsuyuki Utaka, Tomohiko Edura, Masahide Tokuda, Ken Tsutsui, Yasuo Wada, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | SOI (silicon-on-insulator) wafers became popular platforms for photonic integration. Rib waveguides on the SOI wafers have been attracted more attentions due to the advantages, such as low loss, low polarization-dependence and easy fabrication. However, the conventional SOI rib waveguides with a large mode size suffer from bending loss, and the silicon-wire waveguide with a small mode size from a large transmission loss. Here we give a new design of a SOI rib waveguide with a medium mode size. For single-mode waveguides, the bending radius of the new SOI rib waveguide is 1/10 of that of a conventional SOI rib waveguide with a large mode size. In the case of the same surface roughness, the new SOI rib waveguide has a less transmission loss than the silicon-wire waveguide. We fabricated and evaluated the new SOI rib waveguides. The transmission loss and bending radius of the single-mode waveguide are 2dB/cm and 1mm, respectively. These results show that the SOI waveguides with a medium mode size are feasible ones for photonic integrated circuits. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Si waveguide / silicon-on-insulator (SOI) substrate / rib waveguide / mode size |
Paper # | PN2005-71,OFT2005-58,OPE2005-119,LQE2005-134 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2006/1/25(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Design, fabrication and evaluation of feasible SOI rib waveguides with a medium mode size |
Sub Title (in English) | |
Keyword(1) | Si waveguide |
Keyword(2) | silicon-on-insulator (SOI) substrate |
Keyword(3) | rib waveguide |
Keyword(4) | mode size |
1st Author's Name | Zhigang Wu |
1st Author's Affiliation | School of Science and Engineer, WASEDA University() |
2nd Author's Name | Kazuhiko Nakamura |
2nd Author's Affiliation | School of Science and Engineer, WASEDA University |
3rd Author's Name | Soichiro Honda |
3rd Author's Affiliation | School of Science and Engineer, WASEDA University |
4th Author's Name | Katsuyuki Utaka |
4th Author's Affiliation | School of Science and Engineer, WASEDA University |
5th Author's Name | Tomohiko Edura |
5th Author's Affiliation | Nano-technology Research Laboratory, WASEDA University |
6th Author's Name | Masahide Tokuda |
6th Author's Affiliation | Nano-technology Research Laboratory, WASEDA University |
7th Author's Name | Ken Tsutsui |
7th Author's Affiliation | Nano-technology Research Laboratory, WASEDA University |
8th Author's Name | Yasuo Wada |
8th Author's Affiliation | Nano-technology Research Laboratory, WASEDA University |
Date | 2006-02-01 |
Paper # | PN2005-71,OFT2005-58,OPE2005-119,LQE2005-134 |
Volume (vol) | vol.105 |
Number (no) | 592 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |