Presentation | 2006-01-31 Simultaneous interference exposure of different-period DBRs for intra-board WDM optical interconnects Takuo ASADA, Satoshi YAMAGUCHI, Atsushi HORII, Kenzo NISHIO, Shogo URA, Kenji KINTAKA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Two types of interference exposure systems including Lloyd mirror optics were investigated for simultaneous integration of distributed Bragg reflectors (DBRs) of different grating periods in order to construct intra-board chip-to-chip WDM optical interconnects with thin film optical waveguide. Multiplexed wavelength pitch of 3nm and coupling efficiency higher than 80% were discussed with DBRs integrated within 8mm length. It was designed to compensate fabrication errors in optical interconnects board by tuning grating periods of DBRs. Exposure system with eight-face polygon mirror provides integration of sufficient performance DBRs though precise alignment is required in constructing Lloyd mirror optics. Chirped gratings generated by use of cylindrical mirror would be useful though two times exposure is needed. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | optical interconnection / optical thin film waveguide / optical integrated circuits / distributed Bragg reflectors / wavelength division multiplexing / interference exposure / Lloyd's mirror |
Paper # | PN2005-69,OFT2005-56,OPE2005-117,LQE2005-132 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2006/1/24(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Simultaneous interference exposure of different-period DBRs for intra-board WDM optical interconnects |
Sub Title (in English) | |
Keyword(1) | optical interconnection |
Keyword(2) | optical thin film waveguide |
Keyword(3) | optical integrated circuits |
Keyword(4) | distributed Bragg reflectors |
Keyword(5) | wavelength division multiplexing |
Keyword(6) | interference exposure |
Keyword(7) | Lloyd's mirror |
1st Author's Name | Takuo ASADA |
1st Author's Affiliation | Kyoto Institute of Technology() |
2nd Author's Name | Satoshi YAMAGUCHI |
2nd Author's Affiliation | Kyoto Institute of Technology |
3rd Author's Name | Atsushi HORII |
3rd Author's Affiliation | Kyoto Institute of Technology |
4th Author's Name | Kenzo NISHIO |
4th Author's Affiliation | Kyoto Institute of Technology |
5th Author's Name | Shogo URA |
5th Author's Affiliation | Kyoto Institute of Technology |
6th Author's Name | Kenji KINTAKA |
6th Author's Affiliation | National Institute of Advanced Industrial Science and Technology |
Date | 2006-01-31 |
Paper # | PN2005-69,OFT2005-56,OPE2005-117,LQE2005-132 |
Volume (vol) | vol.105 |
Number (no) | 591 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |