| Presentation | 2006/1/20 Fabrication Processes of plated Au Nanometer wired Circuit through Nano-insulation-bed Mikinori Suzuki, Shinya Katou, Shinzo Morita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Fabrication processes of plated Au nanometer wired circuit through nano-insulation bed was proposed. Nano-insulation bed will be fabricated on the impurity doped semi-conductive Si wafer as followings. Si pillars or walls are fabricated by a lithography processes. The pillars or walls and Si flat surface will be oxidized. Then the pillars or walls were etched off. The Si wafer with non-uniform oxidized depth will be fabricated. After uniform etching of SiO2 surface until conductive area is observed on the surface, Au plating is performed on the conductive area at the place that pillars and walls was existed. Au plating liquid is NaAuCl_4 dissolved in ethanol at 0.5 atom% and plated under 9V on negative polarity Si wafer. Au wire with 500 nm width was successfully plated at 9V on the conductive Si wafer area, which was under coated with thin carbon-sulfur-gold (C-S-Au) film. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Au nanometer-wire / Nano-insulation-bed / NaAuCl_4 dissolved in ethanol / Electrical plating / Semi-conductive carbon-sulfur-gold film |
| Paper # | OME2005-109 |
| Date of Issue |
| Conference Information | |
| Committee | OME |
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| Conference Date | 2006/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication Processes of plated Au Nanometer wired Circuit through Nano-insulation-bed |
| Sub Title (in English) | |
| Keyword(1) | Au nanometer-wire |
| Keyword(2) | Nano-insulation-bed |
| Keyword(3) | NaAuCl_4 dissolved in ethanol |
| Keyword(4) | Electrical plating |
| Keyword(5) | Semi-conductive carbon-sulfur-gold film |
| 1st Author's Name | Mikinori Suzuki |
| 1st Author's Affiliation | Graduate School of Engineering, Nagoya University() |
| 2nd Author's Name | Shinya Katou |
| 2nd Author's Affiliation | Graduate School of Engineering, Nagoya University |
| 3rd Author's Name | Shinzo Morita |
| 3rd Author's Affiliation | Graduate School of Engineering, Nagoya University |
| Date | 2006/1/20 |
| Paper # | OME2005-109 |
| Volume (vol) | vol.105 |
| Number (no) | 576 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |