Presentation 2005/8/26
Observing and Taming the Brownian Motion in Micromachined PDMS Chambers
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) We encapsulated a silicon nanoneedle of 3.5μm in length and 170nm in diameter with an approximate aspect ratio of 20 in a 6μm diameter-PDMS microchamber containing DI water. We could observe Brownian motion of the nanoneedles. The nanoneedle can experience rotational motion. The control of the motion and alignment are accomplished by an electric field. Silicon nanoneedles having high aspect ratios such as 20 are possible if nanobeads are used as mask in Deep RIE of silicon. After an ultrasonic bath, needles can be collected by centrifuging. PDMS chambers 2, 4, 6, and 8μms in diameter and 2.2μm in depth are fabricated by replicating structures on SOI wafer. The needle solution is sandwiched between a glass substrate and PDMS chambers. Observation is done by an inverted microscope.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Brownian motion / micromachining / PDMS chambers / nanobeads / Si nanoneedles
Paper # ED2005-117,OME2005-43
Date of Issue

Conference Information
Committee OME
Conference Date 2005/8/26(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Vice Chair

Paper Information
Registration To Organic Material Electronics (OME)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Observing and Taming the Brownian Motion in Micromachined PDMS Chambers
Sub Title (in English)
Keyword(1) Brownian motion
Keyword(2) micromachining
Keyword(3) PDMS chambers
Keyword(4) nanobeads
Keyword(5) Si nanoneedles
1st Author's Name Ersin ALTINTAS
1st Author's Affiliation CIRMM, IIS, The University of TOKYO()
2nd Author's Name Karl F. BOHRINGER
2nd Author's Affiliation The University of WASHINGTON
3rd Author's Name Hiroyuki FUJITA
3rd Author's Affiliation CIRMM, IIS, The University of TOKYO
Date 2005/8/26
Paper # ED2005-117,OME2005-43
Volume (vol) vol.105
Number (no) 258
Page pp.pp.-
#Pages 4
Date of Issue