Presentation | 2005/8/26 Observing and Taming the Brownian Motion in Micromachined PDMS Chambers Ersin ALTINTAS, Karl F. BOHRINGER, Hiroyuki FUJITA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We encapsulated a silicon nanoneedle of 3.5μm in length and 170nm in diameter with an approximate aspect ratio of 20 in a 6μm diameter-PDMS microchamber containing DI water. We could observe Brownian motion of the nanoneedles. The nanoneedle can experience rotational motion. The control of the motion and alignment are accomplished by an electric field. Silicon nanoneedles having high aspect ratios such as 20 are possible if nanobeads are used as mask in Deep RIE of silicon. After an ultrasonic bath, needles can be collected by centrifuging. PDMS chambers 2, 4, 6, and 8μms in diameter and 2.2μm in depth are fabricated by replicating structures on SOI wafer. The needle solution is sandwiched between a glass substrate and PDMS chambers. Observation is done by an inverted microscope. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Brownian motion / micromachining / PDMS chambers / nanobeads / Si nanoneedles |
Paper # | ED2005-117,OME2005-43 |
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Conference Information | |
Committee | OME |
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Conference Date | 2005/8/26(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Observing and Taming the Brownian Motion in Micromachined PDMS Chambers |
Sub Title (in English) | |
Keyword(1) | Brownian motion |
Keyword(2) | micromachining |
Keyword(3) | PDMS chambers |
Keyword(4) | nanobeads |
Keyword(5) | Si nanoneedles |
1st Author's Name | Ersin ALTINTAS |
1st Author's Affiliation | CIRMM, IIS, The University of TOKYO() |
2nd Author's Name | Karl F. BOHRINGER |
2nd Author's Affiliation | The University of WASHINGTON |
3rd Author's Name | Hiroyuki FUJITA |
3rd Author's Affiliation | CIRMM, IIS, The University of TOKYO |
Date | 2005/8/26 |
Paper # | ED2005-117,OME2005-43 |
Volume (vol) | vol.105 |
Number (no) | 258 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |