Presentation 2005/8/26
Theoretical Study of Leaky SAW Propagating along Liquid/LiNbO_3/Sapphire Structure
Shoji Furukawa, Hidetaka Ohta, Tomoki Takamoto, Tooru Nomura,
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Abstract(in English) When liquid is loaded on the surface of the piezoelectric substrate along which the surface acoustic wave propagates, the surface acoustic wave becomes leaky surface acoustic wave, because the energy of the surface acoustic wave is transferred from the substrate to the liquid. Recently, crystalline LiNbO_3 can be grown on the sapphire substrate, and this layered-substrate is expected to be used for high frequency devices. In this paper, phase velocity, propagation loss, electro-mechanical coupling coefficient, and particle displacement distribution of the leaky surface acoustic waves propagating along Liquid/LiNbO_3/Sapphire structures are numerically calculated. As a result, it is found that the LiNbO_3/Sapphire substrate is suitable for the liquid sensor.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Surface Acoustic Wave / Leaky SAW / Piezoelectric Material / LiNbO_3 / Sapphire
Paper # ED2005-109,OME2005-35
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Committee OME
Conference Date 2005/8/26(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Theoretical Study of Leaky SAW Propagating along Liquid/LiNbO_3/Sapphire Structure
Sub Title (in English)
Keyword(1) Surface Acoustic Wave
Keyword(2) Leaky SAW
Keyword(3) Piezoelectric Material
Keyword(4) LiNbO_3
Keyword(5) Sapphire
1st Author's Name Shoji Furukawa
1st Author's Affiliation Graduate School of Computer Science and Systems Engineering, Kyushu Institute of Technology()
2nd Author's Name Hidetaka Ohta
2nd Author's Affiliation Graduate School of Computer Science and Systems Engineering, Kyushu Institute of Technology
3rd Author's Name Tomoki Takamoto
3rd Author's Affiliation Graduate School of Computer Science and Systems Engineering, Kyushu Institute of Technology
4th Author's Name Tooru Nomura
4th Author's Affiliation Faculty of Engineering, Shibaura Institute of Technology
Date 2005/8/26
Paper # ED2005-109,OME2005-35
Volume (vol) vol.105
Number (no) 258
Page pp.pp.-
#Pages 6
Date of Issue