Presentation 2002/6/24
Characterization and Simulation of Polycrystalline-Silicon Thin-Film Transistors
Mutsumi KIMURA, Satoshi INOUE, Tatsuya SHIMODA,
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Abstract(in English) Characterization and simulation of polycrystalline-silicon thin-film transistors (poly-Si TFTs) are explained with some examples of their applications. For characterization, a technique to extract trap densities at oxide interfaces and grain boundaries has been developed. Actual trap densities are extracted, and degradation is analyzed. For device simulation, these trap states are implemented and carrier transport through grain boundaries is modeled. Dependence of transistor characteristics on these trap states is analyzed. For circuit simulation, a numerical model has been developed to reproduce transistor characteristics using experiments or the device simulation mentioned above.
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Keyword(in English) Polycrystalline-Silicon / poly-Si / Thin-Film Transistor / TFT / Characterization / Simulation
Paper # ED2002-151
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Committee ED
Conference Date 2002/6/24(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Characterization and Simulation of Polycrystalline-Silicon Thin-Film Transistors
Sub Title (in English)
Keyword(1) Polycrystalline-Silicon
Keyword(2) poly-Si
Keyword(3) Thin-Film Transistor
Keyword(4) TFT
Keyword(5) Characterization
Keyword(6) Simulation
1st Author's Name Mutsumi KIMURA
1st Author's Affiliation Technology Platform Research Center, Seiko Epson Corporation()
2nd Author's Name Satoshi INOUE
2nd Author's Affiliation Technology Platform Research Center, Seiko Epson Corporation
3rd Author's Name Tatsuya SHIMODA
3rd Author's Affiliation Technology Platform Research Center, Seiko Epson Corporation
Date 2002/6/24
Paper # ED2002-151
Volume (vol) vol.102
Number (no) 175
Page pp.pp.-
#Pages 6
Date of Issue