| Presentation | 2002/6/24 Effect of hydrogen annealing on electrical properties of Bi-layered perovskite thin films Chun Keun Kim, Ik-Soo Kim, Hoon Sang Choi, Seong-Il Kim, Chang Woo Lee, Yong Tae Kim, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | It is well known that ferroelectric properties of Pt/SBT and Pt/SBN thin films are degraded due to the Pt catalytic reaction after H_2 annaealing. However, sometimes SBT and SBN film itself may be degraded after the H_2 annaealing. In this work, we have studied interface trap between SBT (or SBN) and Si, effects of bias stress on flat band voltage and asymmetric hystersis shift before and after H_2 annaealing at curie temperature and higher temperature than curie point. As an alternative top electrode, Ir and IrO_2 /SBT (or SBN)/Si structures have been investigated with H_2 annaealing. Also, we will discuss changes in electrical properties after the recovery process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hyrogen annealing / Bi-layered perovskite / interface trap / curie temperature |
| Paper # | ED2002-148 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/6/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of hydrogen annealing on electrical properties of Bi-layered perovskite thin films |
| Sub Title (in English) | |
| Keyword(1) | hyrogen annealing |
| Keyword(2) | Bi-layered perovskite |
| Keyword(3) | interface trap |
| Keyword(4) | curie temperature |
| 1st Author's Name | Chun Keun Kim |
| 1st Author's Affiliation | Semiconductor Lab.() |
| 2nd Author's Name | Ik-Soo Kim |
| 2nd Author's Affiliation | Semiconductor Lab. |
| 3rd Author's Name | Hoon Sang Choi |
| 3rd Author's Affiliation | Semiconductor Lab. |
| 4th Author's Name | Seong-Il Kim |
| 4th Author's Affiliation | Semiconductor Lab. |
| 5th Author's Name | Chang Woo Lee |
| 5th Author's Affiliation | Dept. of Physics, Kookmin Univ. |
| 6th Author's Name | Yong Tae Kim |
| 6th Author's Affiliation | Semiconductor Lab. |
| Date | 2002/6/24 |
| Paper # | ED2002-148 |
| Volume (vol) | vol.102 |
| Number (no) | 175 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |