| Presentation | 2002/6/24 The C-R Method Used for Leff Extraction and Process Optimization in Nano N/P-MOSFET's Devices Heng-Sheng Huang, Chi-Chin Hu, Chien-Tung Yuen, Jen-Hung Fang, Hsin-Nan Chen, Jwo Shiun Sun, J. K. Chen, Garry Hong, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, a modified C-V method (C-R method) is adopted to improve the nano-MOSFET device performance by optimizing the S/D engineering. Using the C-R method (the Capacitance-Ratio method), more consistent and reasonable L_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | C-R method / effective channel length (L_ |
| Paper # | ED2002-136 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/6/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The C-R Method Used for Leff Extraction and Process Optimization in Nano N/P-MOSFET's Devices |
| Sub Title (in English) | |
| Keyword(1) | C-R method |
| Keyword(2) | effective channel length (L_ |
| Keyword(3) | nano-device |
| Keyword(4) | halo implant |
| Keyword(5) | short channel effect |
| Keyword(6) | 2-D effect |
| Keyword(7) | MSJZ model |
| 1st Author's Name | Heng-Sheng Huang |
| 1st Author's Affiliation | Institute of Mechatronics Engineering, National Taipei University of Technology() |
| 2nd Author's Name | Chi-Chin Hu |
| 2nd Author's Affiliation | Institute of Computer, Communication and Control, National Taipei University of Technology |
| 3rd Author's Name | Chien-Tung Yuen |
| 3rd Author's Affiliation | Institute of Mechatronics Engineering, National Taipei University of Technology |
| 4th Author's Name | Jen-Hung Fang |
| 4th Author's Affiliation | Institute of Mechatronics Engineering, National Taipei University of Technology |
| 5th Author's Name | Hsin-Nan Chen |
| 5th Author's Affiliation | Institute of Mechatronics Engineering, National Taipei University of Technology |
| 6th Author's Name | Jwo Shiun Sun |
| 6th Author's Affiliation | Institute of Computer, Communication and Control, National Taipei University of Technology |
| 7th Author's Name | J. K. Chen |
| 7th Author's Affiliation | Central R_D Division, United Microelectronics Corporation |
| 8th Author's Name | Garry Hong |
| 8th Author's Affiliation | Central Integration Division, United Microelectronics Corporation |
| Date | 2002/6/24 |
| Paper # | ED2002-136 |
| Volume (vol) | vol.102 |
| Number (no) | 175 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |