| Presentation | 2002/6/24 A Novel Meshing Scheme for Numerical Simulation of Semiconductor Process and Device with Arbitrary Topography Ohseob Kwon, Sangho Yoon, Yountae Kim, Taeyoung Won, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report a scheme of mesh generation from an arbitrary topography for semiconductor process and device simulation. A 3D complex structure is generated by the topography simulation based on the cell method. To translate from the planar/non-planar resulting structure into mesh structure, a novel approach is proposed by using the extraction of surface information, followed by generating 3D mesh with advancing front method (AFM). For the numerical simulation to calculating capacitances, finite element method (FEM) is employed. In this paper, this scheme is presented and verified with applications to the 4 conductors of 2μm width with non-planar surface as an example. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Topography / Cell Method / Mesh Generation / Advancing Front Method / NURBS / Semiconductor Process and Device Simulation |
| Paper # | ED2002-133 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/6/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Novel Meshing Scheme for Numerical Simulation of Semiconductor Process and Device with Arbitrary Topography |
| Sub Title (in English) | |
| Keyword(1) | Topography |
| Keyword(2) | Cell Method |
| Keyword(3) | Mesh Generation |
| Keyword(4) | Advancing Front Method |
| Keyword(5) | NURBS |
| Keyword(6) | Semiconductor Process and Device Simulation |
| 1st Author's Name | Ohseob Kwon |
| 1st Author's Affiliation | Computational Electronics Center, School of Electrical and Computer Engineering, Inha University() |
| 2nd Author's Name | Sangho Yoon |
| 2nd Author's Affiliation | Computational Electronics Center, School of Electrical and Computer Engineering, Inha University |
| 3rd Author's Name | Yountae Kim |
| 3rd Author's Affiliation | Computational Electronics Center, School of Electrical and Computer Engineering, Inha University |
| 4th Author's Name | Taeyoung Won |
| 4th Author's Affiliation | Computational Electronics Center, School of Electrical and Computer Engineering, Inha University |
| Date | 2002/6/24 |
| Paper # | ED2002-133 |
| Volume (vol) | vol.102 |
| Number (no) | 175 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |