Presentation 2002/6/24
The relationship of Gate Length to RF Characteristics of SiC-MESFETs : RF Characteristics of Short-Channel SiC-MESFETs
Manabu ARAI, Hirotake HONDA, Makoto OGATA, Hiroshi SAWAZAKI, Shuichi ONO,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We studied the RF characteristics of SiC-MESFETs with gate lengths from 0.3 to 1.5 μm that were fabricated on the same epitaxial wafer. When the gate length was less than 1.0 μm, the cutoff frequency ft and maximum oscillation frequency fmax were less dependent on the gate length. The degradation of these RF characteristics was apparently caused by the short-channel effect. To uncover the mechanism underlying this, we investigated static electrical characteristics, such as the transconductance and pinch-off voltage, of short-channel SiC-MESFETs and found that the short-channel effect occurred when the aspect ratio of the gate length to channel thickness was 5 or less.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SiC / MESFET / Gate length / Short-channel effect / Pinch-off
Paper # ED2002-131
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Committee ED
Conference Date 2002/6/24(1days)
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Registration To Electron Devices (ED)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The relationship of Gate Length to RF Characteristics of SiC-MESFETs : RF Characteristics of Short-Channel SiC-MESFETs
Sub Title (in English)
Keyword(1) SiC
Keyword(2) MESFET
Keyword(3) Gate length
Keyword(4) Short-channel effect
Keyword(5) Pinch-off
1st Author's Name Manabu ARAI
1st Author's Affiliation New Japan Radio Co., Ltd., Microwave Division()
2nd Author's Name Hirotake HONDA
2nd Author's Affiliation New Japan Radio Co., Ltd., Microwave Division
3rd Author's Name Makoto OGATA
3rd Author's Affiliation New Japan Radio Co., Ltd., Microwave Division
4th Author's Name Hiroshi SAWAZAKI
4th Author's Affiliation New Japan Radio Co., Ltd., Microwave Division
5th Author's Name Shuichi ONO
5th Author's Affiliation New Japan Radio Co., Ltd., Microwave Division
Date 2002/6/24
Paper # ED2002-131
Volume (vol) vol.102
Number (no) 175
Page pp.pp.-
#Pages 4
Date of Issue