| Presentation | 2002/6/24 Design and Fabrication of SiC RESURF MOSFETs Hajime Kosugi, Taichi Hirao, Hiroshi Yano, Jun Suda, Tsunenobu Kimoto, Hiroyuki Matsunami, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Design consideration and characteristics of the fabricated SiC RESURF MOSFETs are described. The RESURF (REduced SURface Field) structure is one of the most widely-used concepts for the design of lateral high-voltage devices, which are key components in power integrated circuits. The RESURF structure in SiC lateral MOSFETs was optimized by using a device simulator. Then RESURF MOSFETs were fabricated on 6H-SiC. A MOSFET exhibited the maximum breakdown-voltage of 700 V and the minimum specific on-resistance of 0.69 Ωcm^2. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | silicon carbide / power MOSFET / RESURF / simulation |
| Paper # | ED2002-130 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/6/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Design and Fabrication of SiC RESURF MOSFETs |
| Sub Title (in English) | |
| Keyword(1) | silicon carbide |
| Keyword(2) | power MOSFET |
| Keyword(3) | RESURF |
| Keyword(4) | simulation |
| 1st Author's Name | Hajime Kosugi |
| 1st Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University() |
| 2nd Author's Name | Taichi Hirao |
| 2nd Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| 3rd Author's Name | Hiroshi Yano |
| 3rd Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| 4th Author's Name | Jun Suda |
| 4th Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| 5th Author's Name | Tsunenobu Kimoto |
| 5th Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| 6th Author's Name | Hiroyuki Matsunami |
| 6th Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| Date | 2002/6/24 |
| Paper # | ED2002-130 |
| Volume (vol) | vol.102 |
| Number (no) | 175 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |