| Presentation | 2002/6/24 A New Junction Termination in Power Semiconductor Devices employing Trench Jae-Keun OH, Min-woo HA, Kwang-Seok SEO, Yearn-Ik CHOI, Min-Koo Han, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have proposed a new junction termination method by employing a shallow oxide trench in order to decrease the junction termination area without sacrificing the breakdown voltage characteristics of the power semiconductor devices. The proposed trench floating field-limiting ring structure decrease the total junction termination area by reducing the space between field-limiting rings (FLR). Reduced space can be obtained due to reduced lateral diffusion region and lower dielectric constant of the silicon dioxide. Our simulations results show that the total junction termination area is considerably decreased with same breakdown voltage condition. Junction termination area of 600V rated device is decreased by 20% compared with that of the conventional FLR structure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | junction termination / field-limiting ring / breakdown |
| Paper # | ED2002-129 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/6/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A New Junction Termination in Power Semiconductor Devices employing Trench |
| Sub Title (in English) | |
| Keyword(1) | junction termination |
| Keyword(2) | field-limiting ring |
| Keyword(3) | breakdown |
| 1st Author's Name | Jae-Keun OH |
| 1st Author's Affiliation | School of Electrical Eng. #50, Seoul National University() |
| 2nd Author's Name | Min-woo HA |
| 2nd Author's Affiliation | School of Electrical Eng. #50, Seoul National University |
| 3rd Author's Name | Kwang-Seok SEO |
| 3rd Author's Affiliation | School of Electrical Eng. #50, Seoul National University |
| 4th Author's Name | Yearn-Ik CHOI |
| 4th Author's Affiliation | College of Electronics Eng., Ajou University |
| 5th Author's Name | Min-Koo Han |
| 5th Author's Affiliation | School of Electrical Eng. #50, Seoul National University |
| Date | 2002/6/24 |
| Paper # | ED2002-129 |
| Volume (vol) | vol.102 |
| Number (no) | 175 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |