| Presentation | 2002/4/9 Low Temperature Solid-Phase Crystallization of a-Si/SiO_2 Enhanced by Bond Modulation Taizoh SADOH, Isao TSUNODA, Kei NAGATOMO, Atsushi KENJO, Masanobu MIYAO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Effects of Ge doping and ion-irradiation on solid-phase crystallization of amorphous Si on SiO_2 have been investigated. The results showed that the annealing temperature required to crystal nucleation significantly decreased to 400℃ by using both Ge doping and ion-irradiation (25 keV, 1x10^<16> cm^<-2>). In addition, crystal growth along both (111) and (220) direction was confirmed by using X-ray diffraction method. The enhancement of crystal nucleation is discussed on the basis of Si-Si bond-modulation induced by Ge doping and ion-irradiation. This bond modulation method will be a powerful tool to fabricate high-quality and low-cost poly-Si thin-film transistors on glass substrates. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Poly-Si / Solid-phase crystallization / Crystal nucleation / Ge / Ion-irradiation |
| Paper # | OME2002-5 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2002/4/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low Temperature Solid-Phase Crystallization of a-Si/SiO_2 Enhanced by Bond Modulation |
| Sub Title (in English) | |
| Keyword(1) | Poly-Si |
| Keyword(2) | Solid-phase crystallization |
| Keyword(3) | Crystal nucleation |
| Keyword(4) | Ge |
| Keyword(5) | Ion-irradiation |
| 1st Author's Name | Taizoh SADOH |
| 1st Author's Affiliation | Department of Electronics, Kyushu University() |
| 2nd Author's Name | Isao TSUNODA |
| 2nd Author's Affiliation | Department of Electronics, Kyushu University |
| 3rd Author's Name | Kei NAGATOMO |
| 3rd Author's Affiliation | Department of Electronics, Kyushu University |
| 4th Author's Name | Atsushi KENJO |
| 4th Author's Affiliation | Department of Electronics, Kyushu University |
| 5th Author's Name | Masanobu MIYAO |
| 5th Author's Affiliation | Department of Electronics, Kyushu University |
| Date | 2002/4/9 |
| Paper # | OME2002-5 |
| Volume (vol) | vol.102 |
| Number (no) | 8 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |